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Paul Jung
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Florstadt, DE
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last 30 patents
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Patent Grant
Method for optically inspecting a wafer by sequentially illuminatin...
Patent number
7,460,219
Issue date
Dec 2, 2008
Vistec Semiconductor Systems GmbH
Paul-Gottfried Jung
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method for inspecting a wafer
Publication number
20050168729
Publication date
Aug 4, 2005
Leica Microsystems Semiconductor GmbH
Paul Jung
G01 - MEASURING TESTING