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Paul Kaiser
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Munich, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for regulating a light source of a photolithography exposure...
Patent number
9,864,277
Issue date
Jan 9, 2018
SUSS MicroTec Lithography GmbH
Paul Kaiser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment patterns for two objects to be aligned relative to each o...
Patent number
5,172,190
Issue date
Dec 15, 1992
Karl Suss KG Prazisionsgerate fur Wissenschaft und Industrie - GmbH & Co.
Paul Kaiser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical device for forming crossed linear image elements
Patent number
4,834,499
Issue date
May 30, 1989
Karl Suss KG, GmbH & Co.
Paul Kaiser
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
Method for Regulating a Light Source of a Photolithography Exposure...
Publication number
20160291480
Publication date
Oct 6, 2016
SUSS MICROTEC LITHOGRAPHY GMBH
Paul Kaiser
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY