Paul Kevin Shufflebotham

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cooling water jet pack for high power rotary cathodes
- Patent number 10,262,843
- Issue date Apr 16, 2019
- Beijing Apollo Ding Rong Solar Technology Co., Ltd.
- Robert Martinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling water jet pack for high power rotary cathodes
- Patent number 9,512,516
- Issue date Dec 6, 2016
- Beijing Apollo Ding Rong Solar Technology Co., Ltd.
- Robert Martinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous web apparatus and method using an air to vacuum seal and...
- Patent number 9,303,316
- Issue date Apr 5, 2016
- APOLLO PRECISION KUNMING YUANHONG LIMITED
- Paul Shufflebotham
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Photovoltaic cell with copper poor CIGS absorber layer and method o...
- Patent number 9,169,548
- Issue date Oct 27, 2015
- Apollo Precision Fujian Limited
- John Corson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photovoltaic device and method and system for making photovoltaic d...
- Patent number 8,956,888
- Issue date Feb 17, 2015
- Apollo Precision Fujian Limited
- Paul Shufflebotham
- B32 - LAYERED PRODUCTS
Information Patent Grant
Combination photovoltaic and wind power generation installation
- Patent number 8,710,350
- Issue date Apr 29, 2014
- Paul Shufflebotham
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Method and apparatus for abatement of reaction products from a vacu...
- Patent number 8,664,560
- Issue date Mar 4, 2014
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Retainers for attaching photovoltaic modules to mounting structures
- Patent number 8,656,658
- Issue date Feb 25, 2014
- Miasole
- Paul Shufflebotham
- B32 - LAYERED PRODUCTS
Information Patent Grant
Sulfur salt containing CIG targets, methods of making and methods o...
- Patent number 8,048,707
- Issue date Nov 1, 2011
- Miasole
- Paul Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for abatement of reaction products from a vacu...
- Patent number 6,888,040
- Issue date May 3, 2005
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a silicon containing layer on a semiconductor...
- Patent number 6,626,185
- Issue date Sep 30, 2003
- Lam Research Corporation
- Alex Demos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Predictive wafer temperature control system and method
- Patent number 6,468,384
- Issue date Oct 22, 2002
- Novellus Systems, Inc.
- Vikram Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma CVD
- Patent number 6,184,158
- Issue date Feb 6, 2001
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of high density plasma CVD gap-filling
- Patent number 6,106,678
- Issue date Aug 22, 2000
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two-element plasma resistant lightpipe assembly
- Patent number 6,086,246
- Issue date Jul 11, 2000
- Novellus Systems, Inc.
- Paul Kevin Shufflebotham
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic clamping method and apparatus for dielectric workpiec...
- Patent number 5,847,918
- Issue date Dec 8, 1998
- Lam Research Corporation
- Paul Kevin Shufflebotham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low voltage electrostatic clamp for substrates such as dielectric s...
- Patent number 5,838,529
- Issue date Nov 17, 1998
- Lam Research Corporation
- Paul Kevin Shufflebotham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrostatic clamp with lip seal for clamping substrates
- Patent number 5,805,408
- Issue date Sep 8, 1998
- Lam Research Corporation
- Robert Maraschin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of polycrystalline silicon hydrogenation
- Patent number 5,711,998
- Issue date Jan 27, 1998
- Lam Research Corporation
- Paul Kevin Shufflebotham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shape memory alloy lift pins for semiconductor processing equipment
- Patent number 5,669,977
- Issue date Sep 23, 1997
- Lam Research Corporation
- Paul Kevin Shufflebotham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for magnetron in-situ cleaning of plasma react...
- Patent number 5,503,676
- Issue date Apr 2, 1996
- Lam Research Corporation
- Paul K. Shufflebotham
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLING WATER JET PACK FOR HIGH POWER ROTARY CATHODES
- Publication number 20170140906
- Publication date May 18, 2017
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Robert Martinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS WEB APPARATUS AND METHOD USING AN AIR TO VACUUM SEAL AND...
- Publication number 20160190383
- Publication date Jun 30, 2016
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Paul Shufflebotham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Impermeable PVD Target Coating for Porous Target Materials
- Publication number 20130048488
- Publication date Feb 28, 2013
- Miasole
- Paul Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINATION PHOTOVOLTAIC AND WIND POWER GENERATION INSTALLATION
- Publication number 20120267901
- Publication date Oct 25, 2012
- MIASOLE
- Paul Shufflebotham
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Photovoltaic Device and Method and System for Making Photovoltaic D...
- Publication number 20120103383
- Publication date May 3, 2012
- MIASOLE
- Paul Shufflebotham
- B32 - LAYERED PRODUCTS
Information Patent Application
RETAINERS FOR ATTACHING PHOTOVOLTAIC MODULES TO MOUNTING STRUCTURES
- Publication number 20120097207
- Publication date Apr 26, 2012
- MIASOLE
- Paul Shufflebotham
- F24 - HEATING RANGES VENTILATING
Information Patent Application
MODIFIED BAND GAP WINDOW LAYER FOR A CIGS ABSORBER CONTAINING PHOTO...
- Publication number 20120090671
- Publication date Apr 19, 2012
- Paul Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLEXIBLE PHOTOVOLTAIC MODULES IN A CONTINUOUS ROLL
- Publication number 20110308563
- Publication date Dec 22, 2011
- MIASOLE
- Paul Shufflebotham
- B32 - LAYERED PRODUCTS
Information Patent Application
PHOTOVOLTAIC MODULE ELECTRICAL CONNECTORS
- Publication number 20110308562
- Publication date Dec 22, 2011
- MIASOLE
- Paul Shufflebotham
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
POLISHING A THIN METALLIC SUBSTRATE FOR A SOLAR CELL
- Publication number 20100258173
- Publication date Oct 14, 2010
- Joseph LAIA
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for abatement of reaction products from a vacu...
- Publication number 20050155854
- Publication date Jul 21, 2005
- Lam Research Corporation
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Inductively coupled plasma CVD
- Publication number 20010019903
- Publication date Sep 6, 2001
- Paul Kevin Shufflebotham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEANING METHOD FOR SUBSTRATE PROCESSING CHAMBER US...
- Publication number 20010008138
- Publication date Jul 19, 2001
- ALEX DEMOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Paul Kevin Shufflebotham

Person

Patents Grantslast 30 patents

Cooling water jet pack for high power rotary cathodes

Cooling water jet pack for high power rotary cathodes

Continuous web apparatus and method using an air to vacuum seal and...

Photovoltaic cell with copper poor CIGS absorber layer and method o...

Photovoltaic device and method and system for making photovoltaic d...

Combination photovoltaic and wind power generation installation

Method and apparatus for abatement of reaction products from a vacu...

Retainers for attaching photovoltaic modules to mounting structures

Sulfur salt containing CIG targets, methods of making and methods o...

Method and apparatus for abatement of reaction products from a vacu...

Method of depositing a silicon containing layer on a semiconductor...

Predictive wafer temperature control system and method

Inductively coupled plasma CVD

Method of high density plasma CVD gap-filling

Two-element plasma resistant lightpipe assembly

Electrostatic clamping method and apparatus for dielectric workpiec...

Low voltage electrostatic clamp for substrates such as dielectric s...

Electrostatic clamp with lip seal for clamping substrates

Method of polycrystalline silicon hydrogenation

Shape memory alloy lift pins for semiconductor processing equipment

Apparatus and method for magnetron in-situ cleaning of plasma react...

Patents Applicationslast 30 patents

COOLING WATER JET PACK FOR HIGH POWER ROTARY CATHODES

CONTINUOUS WEB APPARATUS AND METHOD USING AN AIR TO VACUUM SEAL AND...

Impermeable PVD Target Coating for Porous Target Materials

COMBINATION PHOTOVOLTAIC AND WIND POWER GENERATION INSTALLATION

Photovoltaic Device and Method and System for Making Photovoltaic D...

RETAINERS FOR ATTACHING PHOTOVOLTAIC MODULES TO MOUNTING STRUCTURES

MODIFIED BAND GAP WINDOW LAYER FOR A CIGS ABSORBER CONTAINING PHOTO...

FLEXIBLE PHOTOVOLTAIC MODULES IN A CONTINUOUS ROLL

PHOTOVOLTAIC MODULE ELECTRICAL CONNECTORS

POLISHING A THIN METALLIC SUBSTRATE FOR A SOLAR CELL

Method and apparatus for abatement of reaction products from a vacu...

Inductively coupled plasma CVD

IN-SITU CHAMBER CLEANING METHOD FOR SUBSTRATE PROCESSING CHAMBER US...