Paul Lukas Brillhart

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate support leveling apparatus
- Patent number 12,131,934
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar electrostatic chuck to limit DC discharge
- Patent number 12,057,339
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pressure bipolar electrostatic chucking
- Patent number 12,040,210
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for alignment of a susceptor
- Patent number 11,859,307
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Edric Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Part, sensor, and metrology data integration
- Patent number 11,853,042
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Garrett Ho-Yee Sin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thermal processing susceptor
- Patent number 10,930,543
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and methods for alignment of a susceptor
- Patent number 10,883,190
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Edric Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light pipe window structure for low pressure thermal processes
- Patent number 10,727,093
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Paul Brillhart
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Upper dome with injection assembly
- Patent number 10,458,040
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Paul Brillhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 10,306,708
- Issue date May 28, 2019
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor design to reduce edge thermal peak
- Patent number 10,269,614
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Schubert S. Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system with lamphead having temperature manage...
- Patent number 10,202,707
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Joseph M. Ranish
- F21 - LIGHTING
Information Patent Grant
EPI base ring
- Patent number 10,119,192
- Issue date Nov 6, 2018
- Applied Materials, Inc.
- Steve Aboagye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 10,077,508
- Issue date Sep 18, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 10,062,598
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process chamber having separate process gas and purge gas regions
- Patent number 9,870,919
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Window cooling using compliant material
- Patent number 9,863,043
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper dome with injection assembly
- Patent number 9,845,550
- Issue date Dec 19, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C30 - CRYSTAL GROWTH
Information Patent Grant
Absorbing lamphead face
- Patent number 9,842,753
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 9,832,816
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with surface feature for reduced reflection and m...
- Patent number 9,814,099
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Shu-Kwan Lau
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Quartz upper and lower domes
- Patent number 9,768,043
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Anzhong Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal coupled quartz dome heat sink
- Patent number 9,748,121
- Issue date Aug 29, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dome cooling using compliant material
- Patent number 9,711,382
- Issue date Jul 18, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multizone control of lamps in a conical lamphead using pyrometers
- Patent number 9,580,835
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Joseph M. Ranish
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heated showerhead assembly
- Patent number 9,570,275
- Issue date Feb 14, 2017
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor support shaft with uniformity tuning lenses for EPI process
- Patent number 9,532,401
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EPI base ring
- Patent number 9,322,097
- Issue date Apr 26, 2016
- Applied Materials, Inc.
- Steve Aboagye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE
- Publication number 20250014934
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PART, SENSOR, AND METROLOGY DATA INTEGRATION
- Publication number 20240061409
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Garrett Ho-Yee Sin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PART, SENSOR, AND METROLOGY DATA INTEGRATION
- Publication number 20220260978
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Garrett Ho-Yee Sin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE
- Publication number 20220130704
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...
- Publication number 20220127723
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING
- Publication number 20220122873
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT POWER TRANSMISSION COMPONENTS
- Publication number 20220122817
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Paul L. Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS
- Publication number 20220108907
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...
- Publication number 20220093371
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE
- Publication number 20220037126
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT WITH WAFER BACKSIDE DAMAGE CONTROL
- Publication number 20210287924
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20210183657
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- DAVID W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20210175115
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY
- Publication number 20210066039
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR ALIGNMENT OF A SUSCEPTOR
- Publication number 20210002786
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- EDRIC TONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20180366363
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS
- Publication number 20180138031
- Publication date May 17, 2018
- Applied Materials, Inc.
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20180084610
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER DOME WITH INJECTION ASSEMBLY
- Publication number 20180066382
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
QUARTZ UPPER AND LOWER DOMES
- Publication number 20180005856
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Anzhong CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL COUPLED QUARTZ DOME HEAT SINK
- Publication number 20170338135
- Publication date Nov 23, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOME COOLING USING COMPLIANT MATERIAL
- Publication number 20170316964
- Publication date Nov 2, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20170130359
- Publication date May 11, 2017
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
ABSORBING LAMPHEAD FACE
- Publication number 20160336205
- Publication date Nov 17, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI BASE RING
- Publication number 20160230276
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- STEVE ABOAGYE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS
- Publication number 20160138188
- Publication date May 19, 2016
- Applied Materials, Inc.
- Joseph M. RANISH
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK
- Publication number 20160133504
- Publication date May 12, 2016
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS

Paul Lukas Brillhart

Person

Patents Grantslast 30 patents

Semiconductor substrate support leveling apparatus

Systems and methods for substrate support temperature control

Bipolar electrostatic chuck to limit DC discharge

Multi-pressure bipolar electrostatic chucking

Apparatus and methods for alignment of a susceptor

Part, sensor, and metrology data integration

Thermal processing susceptor

Thermal processing susceptor

Apparatus and methods for alignment of a susceptor

Light pipe window structure for low pressure thermal processes

Upper dome with injection assembly

Absorbing reflector for semiconductor processing chamber

Susceptor design to reduce edge thermal peak

Substrate processing system with lamphead having temperature manage...

EPI base ring

Multizone control of lamps in a conical lamphead using pyrometers

Thermal processing susceptor

Process chamber having separate process gas and purge gas regions

Window cooling using compliant material

Upper dome with injection assembly

Absorbing lamphead face

Absorbing reflector for semiconductor processing chamber

Substrate support with surface feature for reduced reflection and m...

Quartz upper and lower domes

Thermal coupled quartz dome heat sink

Dome cooling using compliant material

Multizone control of lamps in a conical lamphead using pyrometers

Heated showerhead assembly

Susceptor support shaft with uniformity tuning lenses for EPI process

EPI base ring

Patents Applicationslast 30 patents

BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE

THERMAL PROCESSING SUSCEPTOR

PART, SENSOR, AND METROLOGY DATA INTEGRATION

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

PART, SENSOR, AND METROLOGY DATA INTEGRATION

BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE

HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...

MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING

SEMICONDUCTOR SUBSTRATE SUPPORT POWER TRANSMISSION COMPONENTS

SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS

RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...

FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

SEMICONDUCTOR SUBSTRATE SUPPORT WITH WAFER BACKSIDE DAMAGE CONTROL

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

THERMAL PROCESSING SUSCEPTOR

SEMICONDUCTOR PROCESSING APPARATUS WITH IMPROVED UNIFORMITY

APPARATUS AND METHODS FOR ALIGNMENT OF A SUSCEPTOR

THERMAL PROCESSING SUSCEPTOR

PROCESS CHAMBER HAVING SEPARATE PROCESS GAS AND PURGE GAS REGIONS

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

UPPER DOME WITH INJECTION ASSEMBLY

QUARTZ UPPER AND LOWER DOMES

THERMAL COUPLED QUARTZ DOME HEAT SINK

DOME COOLING USING COMPLIANT MATERIAL

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

ABSORBING LAMPHEAD FACE

EPI BASE RING

MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK