Paul Lustiber

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Chelmsford, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for in-situ uniformity optimization in a rapid thermal proce...
- Patent number 7,205,231
- Issue date Apr 17, 2007
- Axcelis Technologies, Inc.
- Peter A. Frisella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer temperature trajectory control method for high temperature ra...
- Patent number 6,855,916
- Issue date Feb 15, 2005
- Axcelis Technologies, Inc.
- Brian Matthews
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method and apparatus for monitoring charge neutralization operation
- Patent number 5,959,305
- Issue date Sep 28, 1999
- Eaton Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for in-situ uniformity optimization in a rapid thermal proce...
- Publication number 20060094261
- Publication date May 4, 2006
- Peter A. Frisella
- H01 - BASIC ELECTRIC ELEMENTS