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Paul M. Schaible
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Poughkeepsie, NY, US
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last 30 patents
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Patent Grant
Chem-mech polishing method for producing coplanar metal/insulator f...
Patent number
4,944,836
Issue date
Jul 31, 1990
International Business Machines Corporation
Klaus D. Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming conductive lines and vias
Patent number
4,430,365
Issue date
Feb 7, 1984
International Business Machines Corporation
Paul M. Schaible
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming planar metal/insulator structures
Patent number
4,396,458
Issue date
Aug 2, 1983
International Business Machines Corporation
Valeria Platter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching of copper patterns
Patent number
4,352,716
Issue date
Oct 5, 1982
International Business Machines Corporation
Paul M. Schaible
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective dry etching of substrates
Patent number
4,132,586
Issue date
Jan 2, 1979
International Business Machines Corporation
Paul M. Schaible
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reactive ion etching of aluminum
Patent number
3,994,793
Issue date
Nov 30, 1976
International Business Machines Corporation
Joseph M. Harvilchuck
H01 - BASIC ELECTRIC ELEMENTS