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Paul Mantz
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Ehingen, DE
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last 30 patents
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Patent Grant
Device and method for aligning disk-shaped substrates
Patent number
7,004,716
Issue date
Feb 28, 2006
Steag RTP Systems GmbH
Ottmar Graf
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Device for accommodating disk-shaped objects and apparatus for hand...
Publication number
20060245906
Publication date
Nov 2, 2006
Arthur Pelzmann
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Device for accommodating disk-shaped objects and apparatus for hand...
Publication number
20040126213
Publication date
Jul 1, 2004
Arthur Pelzmann
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Device and method for aligning disk-shaped substrates
Publication number
20020172585
Publication date
Nov 21, 2002
Ottmar Graf
H01 - BASIC ELECTRIC ELEMENTS