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Paul Matthews
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method of depositing low dielectric constant carbon doped silicon o...
Patent number
6,632,735
Issue date
Oct 14, 2003
Applied Materials, Inc.
Wai-Fan Yau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of depositing low dielectric constant carbon doped silicon o...
Publication number
20030032305
Publication date
Feb 13, 2003
APPLIED MATERIALS, INC.
Wai-Fan Yau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...