Paul Meneghini

Person

Haverhill, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ozone generator
- Patent number 9,580,318
- Issue date Feb 28, 2017
- MKS Instruments, Inc.
- David Kingston Owens
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ozone generator
- Patent number 9,039,985
- Issue date May 26, 2015
- MKS Instruments, Inc.
- David Kingston Owens
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Control for and method of pulsed gas delivery
- Patent number 8,790,464
- Issue date Jul 29, 2014
- MKS Instruments, Inc.
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal mass flow rate sensor having fixed bypass ratio
- Patent number 7,121,139
- Issue date Oct 17, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Grant
Thermal mass flow rate sensor including bypass passageways and a se...
- Patent number 7,107,834
- Issue date Sep 19, 2006
- MKS Instruments, Inc.
- Paul Meneghini
- G01 - MEASURING TESTING
Information Patent Grant
Reynolds number correction function for mass flow rate sensor
- Patent number 7,000,463
- Issue date Feb 21, 2006
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Grant
Thermal mass flow rate sensor providing increased rate of heat tran...
- Patent number 6,918,295
- Issue date Jul 19, 2005
- MKS Instruments, Inc.
- Ali Shajii
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OZONE GENERATOR
- Publication number 20150232335
- Publication date Aug 20, 2015
- MKS Instruments, Inc.
- David Kingston Owens
- C01 - INORGANIC CHEMISTRY
Information Patent Application
OZONE GENERATOR
- Publication number 20120308440
- Publication date Dec 6, 2012
- MKS Instruments, Inc.
- David Kingston Owens
- C01 - INORGANIC CHEMISTRY
Information Patent Application
CONTROL FOR AND METHOD OF PULSED GAS DELIVERY
- Publication number 20110174219
- Publication date Jul 21, 2011
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer and method of vaporizing a liquid for thin film delivery
- Publication number 20060207503
- Publication date Sep 21, 2006
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal mass flow rate sensor including bypass passageways and a se...
- Publication number 20060101908
- Publication date May 18, 2006
- Paul Meneghini
- G01 - MEASURING TESTING
Information Patent Application
Thermal mass flow rate sensor having fixed bypass ratio
- Publication number 20060101907
- Publication date May 18, 2006
- Ali Shajii
- G01 - MEASURING TESTING
Information Patent Application
Precursor gas delivery with carrier gas mixing
- Publication number 20060060139
- Publication date Mar 23, 2006
- MKS Instruments, Inc.
- Paul Meneghini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Paul Meneghini

Person

Patents Grantslast 30 patents

Ozone generator

Ozone generator

Control for and method of pulsed gas delivery

Thermal mass flow rate sensor having fixed bypass ratio

Thermal mass flow rate sensor including bypass passageways and a se...

Reynolds number correction function for mass flow rate sensor

Thermal mass flow rate sensor providing increased rate of heat tran...

Patents Applicationslast 30 patents

OZONE GENERATOR

OZONE GENERATOR

CONTROL FOR AND METHOD OF PULSED GAS DELIVERY

Vaporizer and method of vaporizing a liquid for thin film delivery

Thermal mass flow rate sensor including bypass passageways and a se...

Thermal mass flow rate sensor having fixed bypass ratio

Precursor gas delivery with carrier gas mixing