Paul Mertens

Person

Bonheiden, BE

People

Patents Grantslast 30 patents

Information Patent Grant
System for delivering ultrasonic energy to a liquid and use for cle...
- Patent number 9,673,373
- Issue date Jun 6, 2017
- IMEC
- Steven Brems
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Method and apparatus for cleaning semiconductor substrates
- Patent number 9,378,989
- Issue date Jun 28, 2016
- IMEC
- Paul Mertens
- B08 - CLEANING
Information Patent Grant
Substrate treating method and method of manufacturing semiconductor...
- Patent number 8,324,116
- Issue date Dec 4, 2012
- IMEC
- Rita Vos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling optimal operation of acoustic...
- Patent number 8,197,604
- Issue date Jun 12, 2012
- IMEC
- Steven Brems
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for coating substrates
- Patent number 7,867,565
- Issue date Jan 11, 2011
- IMEC
- Wim Fyen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for removing a liquid from a surface of a subs...
- Patent number 7,527,698
- Issue date May 5, 2009
- Interuniversitair Microelektronica Centrum (IMEC, vzw)
- Frank Holsteyns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor cleaning solution
- Patent number 7,521,408
- Issue date Apr 21, 2009
- Interuniversitair Microelektronica Centrum ( IMEC)
- Rita Vos
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for immersion lithography
- Patent number 7,224,433
- Issue date May 29, 2007
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composition comprising an oxidizing and complexing compound
- Patent number 7,160,482
- Issue date Jan 9, 2007
- Imec VZW
- Rita Vos
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Megasonic cleaner and dryer
- Patent number 7,100,304
- Issue date Sep 5, 2006
- Akrion Technologies, Inc.
- Jeffrey M. Lauerhaas
- G01 - MEASURING TESTING
Information Patent Grant
Megasonic cleaner and dryer system
- Patent number 6,928,751
- Issue date Aug 16, 2005
- Goldfinger Technologies, LLC
- Chad M. Hosack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid-treating and drying a substrate
- Patent number 6,910,487
- Issue date Jun 28, 2005
- Imec VZW
- Paul Mertens
- F26 - DRYING
Information Patent Grant
Multi-step method for metal deposition
- Patent number 6,863,795
- Issue date Mar 8, 2005
- Interuniversitair Microelektronica Centrum (IMEC)
- Ivo Teerlinck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for localized liquid treatment of the surface...
- Patent number 6,851,435
- Issue date Feb 8, 2005
- Interuniversitair Microelektronica Centrum (IMEC, vzw)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing a liquid from a surface
- Patent number 6,821,349
- Issue date Nov 23, 2004
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Megasonic cleaner and dryer
- Patent number 6,754,980
- Issue date Jun 29, 2004
- Goldfinger Technologies, LLC
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing particles and a liquid from a surface of substrate
- Patent number 6,676,765
- Issue date Jan 13, 2004
- Interuniversitair Microelektronica Centrum
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for liquid-treating and drying a substrate
- Patent number 6,632,751
- Issue date Oct 14, 2003
- Interuniversitair Microelekronica Centrum (IMEC VZW)
- Paul Mertens
- F26 - DRYING
Information Patent Grant
Chemical solution and method for reducing the metal contamination o...
- Patent number 6,592,676
- Issue date Jul 15, 2003
- Interuniversitair Micro-Elektronica Centrum
- Paul Mertens
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for removing a liquid from a surface of a rota...
- Patent number 6,568,408
- Issue date May 27, 2003
- Interuniversitair Microelektronica Centrum (IMEC, vzw)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing organic contaminants from a semiconductor surface
- Patent number 6,551,409
- Issue date Apr 22, 2003
- Interuniversitair Microelektronica Centrum, vzw
- Stefan DeGendt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for wet cleaning or etching a flat substrate
- Patent number 6,530,385
- Issue date Mar 11, 2003
- Interuniversitair Microelektronica Centrum (IMEC)
- Marc Meuris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing a liquid from a surface of a rota...
- Patent number 6,491,764
- Issue date Dec 10, 2002
- Interuniversitair Microelektronics Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing method for processing discrete pieces of s...
- Patent number 6,472,294
- Issue date Oct 29, 2002
- IMEC VZW
- Marc Meuris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for localized liquid treatment of the surface...
- Patent number 6,398,975
- Issue date Jun 4, 2002
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for growing thin silicon oxides on a silicon substrate using...
- Patent number 6,387,827
- Issue date May 14, 2002
- Imec (vzw)
- Paul Mertens
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for removing a liquid from a surface
- Patent number 6,334,902
- Issue date Jan 1, 2002
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system for processing discrete pieces of s...
- Patent number 6,322,598
- Issue date Nov 27, 2001
- Imec VZW
- Marc Meuris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxidation in an ambient comprising ozone and the reaction products...
- Patent number 6,303,522
- Issue date Oct 16, 2001
- Imec VZW
- Paul Mertens
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of removing particles and a liquid from a surface of substrate
- Patent number 6,261,377
- Issue date Jul 17, 2001
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Performing a Wet Treatment of a Substrate
- Publication number 20180047560
- Publication date Feb 15, 2018
- IMEC vzw
- Paul Mertens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20170076936
- Publication date Mar 16, 2017
- Paul Mertens
- B08 - CLEANING
Information Patent Application
System for Delivering Ultrasonic Energy to a Liquid and Use for Cle...
- Publication number 20140053864
- Publication date Feb 27, 2014
- IMEC
- Steven Brems
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Method and Apparatus for Cleaning Semiconductor Substrates
- Publication number 20120266912
- Publication date Oct 25, 2012
- Katholieke Universiteit Leuven, K.U.Leuven R&D
- Paul Mertens
- B08 - CLEANING
Information Patent Application
Method and Apparatus for Controlling Optimal Operation of Acoustic...
- Publication number 20120227775
- Publication date Sep 13, 2012
- IMEC
- Steven Brems
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Cleaning a Semiconductor Substrate
- Publication number 20110088719
- Publication date Apr 21, 2011
- IMEC
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Controlling Optimal Operation of Acoustic...
- Publication number 20110000504
- Publication date Jan 6, 2011
- IMEC
- Steven Brems
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20100317185
- Publication date Dec 16, 2010
- Rita Vos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Reducing the Damage Induced by a Physical Force Assisted...
- Publication number 20100224215
- Publication date Sep 9, 2010
- IMEC
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Preventing Galvanic Corrosion in Semicondu...
- Publication number 20090223832
- Publication date Sep 10, 2009
- Interuniversitair Microelektronica Centrum vzw (IMEC)
- Sylvain Garaud
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor cleaning solution
- Publication number 20060089280
- Publication date Apr 27, 2006
- Rita Vos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for immersion lithography
- Publication number 20060000381
- Publication date Jan 5, 2006
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for coating substrates
- Publication number 20050079291
- Publication date Apr 14, 2005
- Interuniversitair Microelektronica Centrum (IMEC), a Belgium Corporation
- Wim Fyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composition comprising an oxidizing and complexing compound
- Publication number 20050009207
- Publication date Jan 13, 2005
- Rita Vos
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Application
Megasonic cleaner and dryer
- Publication number 20040231188
- Publication date Nov 25, 2004
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Megasonic cleaner and dryer
- Publication number 20040221473
- Publication date Nov 11, 2004
- Jeffrey M. Lauerhaas
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for removing a liquid from a surface of a subs...
- Publication number 20040045589
- Publication date Mar 11, 2004
- IMEC vzw
- Frank Holsteyns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for liquid-treating and drying a substrate
- Publication number 20040010933
- Publication date Jan 22, 2004
- Paul Mertens
- B08 - CLEANING
Information Patent Application
Apparatus and method for wet cleaning or etching a flat substrate
- Publication number 20030145878
- Publication date Aug 7, 2003
- IMEC vzw
- Marc Meuris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Megasonic cleaner and dryer
- Publication number 20020185152
- Publication date Dec 12, 2002
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Megasonic cleaner and dryer system
- Publication number 20020185154
- Publication date Dec 12, 2002
- Chad M. Hosack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-step method for metal deposition
- Publication number 20020175080
- Publication date Nov 28, 2002
- Ivo Teerlinck
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for removing a liquid from a surface
- Publication number 20020148483
- Publication date Oct 17, 2002
- Interuniversitair Microelektronica Centrum (IMEC)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for removing a liquid from a surface of a rota...
- Publication number 20020130106
- Publication date Sep 19, 2002
- PAUL MERTENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for localized liquid treatment of the surface...
- Publication number 20020125212
- Publication date Sep 12, 2002
- Interuniversitair Micro-Elektronica Centrum, vzw
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for liquid-treating and drying a substrate
- Publication number 20020016082
- Publication date Feb 7, 2002
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING ORGANIC CONTAMINANTS FROM A SEMICONDUCTOR SURFACE
- Publication number 20020011257
- Publication date Jan 31, 2002
- STEFAN DEGENDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing method for processing discrete pieces of s...
- Publication number 20010055857
- Publication date Dec 27, 2001
- IMEC vzw
- Marc Meuris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A LIQUID FROM A SURFACE OF A ROTA...
- Publication number 20010042559
- Publication date Nov 22, 2001
- PAUL MERTENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing particles and a liquid from a surface of substrate
- Publication number 20010022186
- Publication date Sep 20, 2001
- Interuniversitair Micro-Elektronica Centrum (IMEC, vzw)
- Paul Mertens
- H01 - BASIC ELECTRIC ELEMENTS

Paul Mertens

Person

Patents Grantslast 30 patents

System for delivering ultrasonic energy to a liquid and use for cle...

Method and apparatus for cleaning semiconductor substrates

Substrate treating method and method of manufacturing semiconductor...

Method and apparatus for controlling optimal operation of acoustic...

Method for coating substrates

Method and apparatus for removing a liquid from a surface of a subs...

Semiconductor cleaning solution

Method and apparatus for immersion lithography

Composition comprising an oxidizing and complexing compound

Megasonic cleaner and dryer

Megasonic cleaner and dryer system

Method and apparatus for liquid-treating and drying a substrate

Multi-step method for metal deposition

Method and apparatus for localized liquid treatment of the surface...

Method and apparatus for removing a liquid from a surface

Megasonic cleaner and dryer

Method of removing particles and a liquid from a surface of substrate

Method and apparatus for liquid-treating and drying a substrate

Chemical solution and method for reducing the metal contamination o...

Method and apparatus for removing a liquid from a surface of a rota...

Method for removing organic contaminants from a semiconductor surface

Apparatus and method for wet cleaning or etching a flat substrate

Method and apparatus for removing a liquid from a surface of a rota...

Semiconductor processing method for processing discrete pieces of s...

Method and apparatus for localized liquid treatment of the surface...

Method for growing thin silicon oxides on a silicon substrate using...

Method and apparatus for removing a liquid from a surface

Semiconductor processing system for processing discrete pieces of s...

Oxidation in an ambient comprising ozone and the reaction products...

Method of removing particles and a liquid from a surface of substrate

Patents Applicationslast 30 patents

Method for Performing a Wet Treatment of a Substrate

Method and Apparatus for Cleaning a Semiconductor Substrate

System for Delivering Ultrasonic Energy to a Liquid and Use for Cle...

Method and Apparatus for Cleaning Semiconductor Substrates

Method and Apparatus for Controlling Optimal Operation of Acoustic...

Method and Apparatus for Cleaning a Semiconductor Substrate

Method and Apparatus for Controlling Optimal Operation of Acoustic...

SUBSTRATE TREATING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR...

Method for Reducing the Damage Induced by a Physical Force Assisted...

Method and Apparatus for Preventing Galvanic Corrosion in Semicondu...

Semiconductor cleaning solution

Method and apparatus for immersion lithography

Method for coating substrates

Composition comprising an oxidizing and complexing compound

Megasonic cleaner and dryer

Megasonic cleaner and dryer

Method and apparatus for removing a liquid from a surface of a subs...

Method and apparatus for liquid-treating and drying a substrate

Apparatus and method for wet cleaning or etching a flat substrate

Megasonic cleaner and dryer

Megasonic cleaner and dryer system

Multi-step method for metal deposition

Method and apparatus for removing a liquid from a surface

Method and apparatus for removing a liquid from a surface of a rota...

Method and apparatus for localized liquid treatment of the surface...

Method and apparatus for liquid-treating and drying a substrate

METHOD FOR REMOVING ORGANIC CONTAMINANTS FROM A SEMICONDUCTOR SURFACE

Semiconductor processing method for processing discrete pieces of s...

METHOD AND APPARATUS FOR REMOVING A LIQUID FROM A SURFACE OF A ROTA...

Method of removing particles and a liquid from a surface of substrate