Paul Mulgrew

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Wet cleaning of electrostatic chucks
- Patent number 7,052,553
- Issue date May 30, 2006
- Lam Research Corporation
- Hong Shih
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
WET CLEANING OF ELECTROSTATIC CHUCKS
- Publication number 20060112969
- Publication date Jun 1, 2006
- Hong Shih
- B08 - CLEANING