Paul Muller

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Patents Grantslast 30 patents

Information Patent Grant
Chuck means for flat workpieces, in particular semi-conductor wafers
- Patent number 6,669,540
- Issue date Dec 30, 2003
- Peter Wolterss CMP-Systeme GmbH & Co. KG
- Howe Gripp
- B24 - GRINDING POLISHING
Information Patent Grant
Method and device for polishing semiconductor wafers
- Patent number 5,980,361
- Issue date Nov 9, 1999
- Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
- Paul Muller
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Chuck means for flat workpieces, in particular semi-conductor wafers
- Publication number 20030186632
- Publication date Oct 2, 2003
- Howe Gripp
- B24 - GRINDING POLISHING