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Paul Peter Anna Antonius Brom
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Eindhoven, NL
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last 30 patents
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Patent Grant
Method for removal of deposition on an optical element, lithographi...
Patent number
7,868,304
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Levinus Pieter Bakker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Radiation system and lithographic apparatus
Patent number
7,696,492
Issue date
Apr 13, 2010
ASML Netherlands B.V.
Arnoud Cornelis Wassink
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, contaminant trap, and device manufacturing...
Patent number
7,612,353
Issue date
Nov 3, 2009
ASML Netherlands B.V.
Leonid Aizikovitch Sjmaenok
B82 - NANO-TECHNOLOGY
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Patent Grant
Contamination prevention system, lithographic apparatus, radiation...
Patent number
7,602,472
Issue date
Oct 13, 2009
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20100141909
Publication date
Jun 10, 2010
ASML NETHERLANDS B.V.
Arnoud Cornelis Wassink
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Contamination prevention system, lithographic apparatus, radiation...
Publication number
20080309893
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, contaminant trap, and device manufacturing...
Publication number
20070018118
Publication date
Jan 25, 2007
ASML NETHERLANDS B.V.
Leonid Aizikovitch Sjmaenok
B82 - NANO-TECHNOLOGY