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Paul Petrus Joannes Berkvens
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,268,127
Issue date
Apr 23, 2019
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,645,506
Issue date
May 9, 2017
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
9,213,246
Issue date
Dec 15, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Immersion lithographic apparatus including a pressure sensor to mea...
Patent number
8,786,830
Issue date
Jul 22, 2014
ASML Netherlands B.V.
Christophe De Metsenaere
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,681,308
Issue date
Mar 25, 2014
ASML Netherlands B.V.
Paul Petrus Joannes Berkvens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
8,654,309
Issue date
Feb 18, 2014
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Fluid handling structure, lithographic apparatus and a device manuf...
Patent number
8,638,417
Issue date
Jan 28, 2014
ASML Netherlands B.V.
Danny Maria Hubertus Philips
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,634,053
Issue date
Jan 21, 2014
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods relating to immersion lithography and an immersion lithogra...
Patent number
8,587,762
Issue date
Nov 19, 2013
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,472,003
Issue date
Jun 25, 2013
ASML Netherlands B.V.
Hrishikesh Patel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,421,993
Issue date
Apr 16, 2013
ASML Netherlands B.V.
Daniel Jozef Maria Direcks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
8,405,815
Issue date
Mar 26, 2013
ASML Netherlands B.V.
Danny Maria Hubertus Philips
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170242348
Publication date
Aug 24, 2017
ASML NETHERLANDS B.V.
Michel RIEPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACT...
Publication number
20140300879
Publication date
Oct 9, 2014
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140098353
Publication date
Apr 10, 2014
ASML NETHERLANDS B.V.
Michel RIEPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY