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Paul R. Carr
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Gilbert, AZ, US
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last 30 patents
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Patent Grant
Method for handling of wafers with minimal contact
Patent number
6,318,957
Issue date
Nov 20, 2001
ASM America, Inc.
Paul R. Carr
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer carrier and method for handling of wafers with minimal contact
Patent number
6,158,951
Issue date
Dec 12, 2000
ASM America, Inc.
Paul R. Carr
H01 - BASIC ELECTRIC ELEMENTS