Paul R. Unruh

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Tucson, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Automated minimization of optical path difference and reference mir...
- Patent number 6,552,806
- Issue date Apr 22, 2003
- Veeco Instruments Inc.
- Richard W. Swinford
- G01 - MEASURING TESTING
Information Patent Grant
Variable-speed scanning for interferometric measurements
- Patent number 5,726,754
- Issue date Mar 10, 1998
- Wyko Corporation
- Michael P. Andrews
- G01 - MEASURING TESTING