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Paul Rich

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  • Glos, GB
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching apparatus
    • Patent number 10,153,135
    • Issue date Dec 11, 2018
    • SPTS Technologies Limited
    • Anthony Paul Wilby
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method of plasma vapour deposition
    • Patent number 8,337,675
    • Issue date Dec 25, 2012
    • SPTS Technologies Limited
    • Mark Ian Carruthers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition methods and apparatus
    • Patent number 6,949,170
    • Issue date Sep 27, 2005
    • Trikon Holdings Limited
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of depositing a layer
    • Patent number 6,905,962
    • Issue date Jun 14, 2005
    • Trikon Technologies Limited
    • Knut Beekman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and depositing a layer
    • Patent number 6,831,010
    • Issue date Dec 14, 2004
    • Trikon Technologies Limited
    • Knut Beekman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 6,660,140
    • Issue date Dec 9, 2003
    • Trikon Holdings Limited
    • Keith Edward Buchanan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of processing a workpiece
    • Patent number 6,514,389
    • Issue date Feb 4, 2003
    • Trikon Technologies Limited
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of forming a barrier layer
    • Patent number 6,402,907
    • Issue date Jun 11, 2002
    • Trikon Holdings Limited
    • Paul Rich
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Method and Apparatus for Depositing a Material
    • Publication number 20210123130
    • Publication date Apr 29, 2021
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20160379807
    • Publication date Dec 29, 2016
    • SPTS TECHNOLOGIES LIMITED
    • ANTHONY PAUL WILBY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR DEPOSITING A MATERIAL
    • Publication number 20160289815
    • Publication date Oct 6, 2016
    • SPTS TECHNOLOGIES LIMITED
    • STEPHEN R. BURGESS
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF PLASMA VAPOUR DEPOSITION
    • Publication number 20100187097
    • Publication date Jul 29, 2010
    • SPP PROCESS TECHNOLOGY SYSTEMS UK LIMITED
    • Mark Ian Carruthers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods and apparatus for processing the backsides of wafers
    • Publication number 20060182618
    • Publication date Aug 17, 2006
    • Paul Rich
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film deposition
    • Publication number 20050269200
    • Publication date Dec 8, 2005
    • Stephen Robert Burgess
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods and apparatus for controlling rotating magnetic fields
    • Publication number 20050236267
    • Publication date Oct 27, 2005
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods of forming tungsten or tungsten containing films
    • Publication number 20040214417
    • Publication date Oct 28, 2004
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of depositing aluminium nitride
    • Publication number 20040188241
    • Publication date Sep 30, 2004
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for producing a copper connection
    • Publication number 20040180538
    • Publication date Sep 16, 2004
    • Paul Rich
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic clamping of thin wafers in plasma processing vacuum c...
    • Publication number 20040154748
    • Publication date Aug 12, 2004
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of depositing a layer
    • Publication number 20040058529
    • Publication date Mar 25, 2004
    • Knut Beekman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition methods and apparatus
    • Publication number 20040003771
    • Publication date Jan 8, 2004
    • Paul Rich
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and depositing a layer
    • Publication number 20020132460
    • Publication date Sep 19, 2002
    • Knut Beekman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20020000374
    • Publication date Jan 3, 2002
    • KEITH EDWARD BUCHANAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...