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Patents Grants
last 30 patents
Information
Patent Grant
High K artificial lattices for capacitor applications to use in Cu...
Patent number
7,095,073
Issue date
Aug 22, 2006
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-mechanical polisher hardware design
Patent number
7,052,372
Issue date
May 30, 2006
Chartered Semiconductor Manufacturing, Ltd.
Seng-Keong Victor Lim
B24 - GRINDING POLISHING
Information
Patent Grant
High K artificial lattices for capacitor applications to use in CU...
Patent number
6,830,971
Issue date
Dec 14, 2004
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear polishing for improving substrate uniformity
Patent number
6,726,545
Issue date
Apr 27, 2004
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
B24 - GRINDING POLISHING
Information
Patent Grant
STI scheme to prevent fox recess during pre-CMP HF dip
Patent number
6,673,695
Issue date
Jan 6, 2004
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple step CMP polishing
Patent number
6,663,472
Issue date
Dec 16, 2003
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
B24 - GRINDING POLISHING
Information
Patent Grant
Pre STI-CMP planarization scheme
Patent number
6,664,190
Issue date
Dec 16, 2003
Chartered Semiconductor Manufacturing Ltd.
Feng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toxic residual gas removal by non-reactive ion sputtering
Patent number
6,660,642
Issue date
Dec 9, 2003
Chartered Semiconductor Manufacturing Ltd.
Zou Zheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
High K artificial lattices for capacitor applications to use in Cu...
Publication number
20050118780
Publication date
Jun 2, 2005
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High K artificial lattices for capacitor applications to use in CU...
Publication number
20040087101
Publication date
May 6, 2004
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Linear polishing for improving substrate uniformity
Publication number
20030203710
Publication date
Oct 30, 2003
Chartered Semiconductor Manufacturing Ltd.
Subramanian Balakumar
B24 - GRINDING POLISHING
Information
Patent Application
Multiple step CMP polishing
Publication number
20030148712
Publication date
Aug 7, 2003
Chartered Semiconductor Manufacturing Ltd.
Victor Seng-Keong Lim
B24 - GRINDING POLISHING
Information
Patent Application
Chemical-mechanical polisher hardware design
Publication number
20030114086
Publication date
Jun 19, 2003
Seng-Keong Victor Lim
B24 - GRINDING POLISHING
Information
Patent Application
Pre STI-CMP planarization scheme
Publication number
20030054654
Publication date
Mar 20, 2003
Chartered Semiconductor Manufacturing Ltd.
Cheng-Hou Loh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Toxic residual gas removal by non-reactive ion sputtering
Publication number
20030022504
Publication date
Jan 30, 2003
Chartered Semiconductor Manufacturing Ltd.
Zou Zheng
H01 - BASIC ELECTRIC ELEMENTS