Paul Russell

Follow

Person

Brighton, GB

People

Patents Grantslast 30 patents

Information Patent Grant
Detecting defects in a logic region on a wafer
- Patent number 10,923,317
- Issue date Feb 16, 2021
- KLA Corp.
- Junqing Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DETECTING DEFECTS IN A LOGIC REGION ON A WAFER
- Publication number 20200090904
- Publication date Mar 19, 2020
- KLA Corporation
- Junqing Huang
- H01 - BASIC ELECTRIC ELEMENTS