Paul S. Buccos

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Haverhill, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Active particle trapping for process control
- Patent number 8,461,552
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Peter Nunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for cleaning an ion implanter
- Patent number 7,544,254
- Issue date Jun 9, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Paul S. Buccos
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE PARTICLE TRAPPING FOR PROCESS CONTROL
- Publication number 20110049359
- Publication date Mar 3, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Peter Nunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Active particle trapping for process control
- Publication number 20080157007
- Publication date Jul 3, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Peter Nunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN ION IMPLANTER
- Publication number 20080142047
- Publication date Jun 19, 2008
- Paul S. Buccos
- B08 - CLEANING
Information Patent Application
Technique for reducing backside particles
- Publication number 20060124155
- Publication date Jun 15, 2006
- David Edwin Suuronen
- B08 - CLEANING