Paul Shirley

Person

Meridian, ID, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for adjusting surface topography of a substra...
- Patent number 11,450,552
- Issue date Sep 20, 2022
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of lithographically patterning a substrate
- Patent number 8,859,195
- Issue date Oct 14, 2014
- Micron Technology, Inc.
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of lithographically patterning a substrate
- Patent number 8,309,297
- Issue date Nov 13, 2012
- Micron Technology, Inc.
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of reducing photoresist defects during fabrication of a semi...
- Patent number 8,163,468
- Issue date Apr 24, 2012
- Micron Technology, Inc.
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of patterning positive photoresist
- Patent number 8,124,326
- Issue date Feb 28, 2012
- Micron Technology, Inc.
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for a two-step resist soft bake to prevent ILD...
- Patent number 7,846,851
- Issue date Dec 7, 2010
- Micron Technology, Inc.
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for manipulating liquid films on semiconductor...
- Patent number 7,737,055
- Issue date Jun 15, 2010
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for two-step resist soft bake to prevent ILD outgassing duri...
- Patent number 7,605,350
- Issue date Oct 20, 2009
- Micron Technology, Inc.
- Paul Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for manipulating liquid films on semiconductor...
- Patent number 7,470,638
- Issue date Dec 30, 2008
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithographic stepper and/or scanner machines including cleanin...
- Patent number 7,370,659
- Issue date May 13, 2008
- Micron Technology, Inc.
- Craig A. Hickman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithographic stepper and/or scanner machines including cleanin...
- Patent number 7,361,234
- Issue date Apr 22, 2008
- Micron Technology, Inc.
- Craig A. Hickman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling air over a spinning microelect...
- Patent number 6,872,254
- Issue date Mar 29, 2005
- Micron Technology, Inc.
- Paul D. Shirley
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for controlling a temperature of a microelectr...
- Patent number 6,830,619
- Issue date Dec 14, 2004
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spindle chuck cleaner
- Patent number 6,817,057
- Issue date Nov 16, 2004
- Micron Technology, Inc.
- Paul Shirley
- B08 - CLEANING
Information Patent Grant
Methods of photo-processing photoresist
- Patent number 6,645,703
- Issue date Nov 11, 2003
- Micron Technology, Inc.
- Ziad R. Hatab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling air over a spinning microelect...
- Patent number 6,576,055
- Issue date Jun 10, 2003
- Micron Technology, Inc.
- Paul D. Shirley
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate spinning apparatus
- Patent number 6,569,241
- Issue date May 27, 2003
- Micron Technology, Inc.
- Brian F. Gordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate coating and semiconductor processing method of improving...
- Patent number 6,555,276
- Issue date Apr 29, 2003
- Micron Technology, Inc.
- Brian F. Gordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Process liquid dispense method and apparatus
- Patent number 6,548,110
- Issue date Apr 15, 2003
- Micron Technology, Inc.
- Paul Shirley
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for controlling a temperature of a microelectronic substrate
- Patent number 6,548,111
- Issue date Apr 15, 2003
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle forming methods
- Patent number 6,482,552
- Issue date Nov 19, 2002
- Micron Technology, Inc.
- Ziad R. Hatab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process liquid dispense method and apparatus
- Patent number 6,402,845
- Issue date Jun 11, 2002
- Micron Technology, Inc.
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate coating apparatus
- Patent number 6,398,868
- Issue date Jun 4, 2002
- Micron Technology, Inc.
- Brian F. Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for controlling a temperature of a microelectronics subst...
- Patent number 6,322,626
- Issue date Nov 27, 2001
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling air over a spinning microelectronic substrate
- Patent number 6,261,635
- Issue date Jul 17, 2001
- Micron Technology, Inc.
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate coating apparatus and semiconductor processing method of...
- Patent number 6,232,247
- Issue date May 15, 2001
- Micron Technology, Inc.
- Brian F. Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process liquid dispense apparatus
- Patent number 6,171,401
- Issue date Jan 9, 2001
- Micron Technology, Inc.
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration-enhanced spin-on film techniques for semiconductor device...
- Patent number 5,925,410
- Issue date Jul 20, 1999
- Micron Technology, Inc.
- Salman Akram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid dispense method and apparatus
- Patent number 5,912,049
- Issue date Jun 15, 1999
- Micron Technology, Inc.
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming a thin uniform layer of resist for lithography
- Patent number 5,849,435
- Issue date Dec 15, 1998
- Micron Technology, Inc.
- Salman Akram
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRA...
- Publication number 20230005785
- Publication date Jan 5, 2023
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRA...
- Publication number 20210035850
- Publication date Feb 4, 2021
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Lithographically Patterning a Substrate
- Publication number 20130059255
- Publication date Mar 7, 2013
- Micron Technology, Inc.
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods Of Patterning Positive Photoresist
- Publication number 20100227282
- Publication date Sep 9, 2010
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF REDUCING PHOTORESIST DEFECTS DURING FABRICATION OF A SEMI...
- Publication number 20090226847
- Publication date Sep 10, 2009
- Micron Technology, Inc.
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods of Lithographically Patterning a Substrate
- Publication number 20090092933
- Publication date Apr 9, 2009
- Yoshiki Hishiro
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR MANIPULATING LIQUID FILMS ON SEMICONDUCTOR...
- Publication number 20090068848
- Publication date Mar 12, 2009
- Micron Technology, Inc.
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for manipulating liquid films on semiconductor...
- Publication number 20070197050
- Publication date Aug 23, 2007
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for in situ photoresist thickness characterization
- Publication number 20070065575
- Publication date Mar 22, 2007
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for situ photoresist thickness characterizaton
- Publication number 20070056513
- Publication date Mar 15, 2007
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spindle chuck cleaner
- Publication number 20070056608
- Publication date Mar 15, 2007
- Micron Technology, Inc.
- Paul Shirley
- B08 - CLEANING
Information Patent Application
Method and computer-readable medium for in situ photoresist thickne...
- Publication number 20070061035
- Publication date Mar 15, 2007
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for in situ photoresist thickness characterization
- Publication number 20070026134
- Publication date Feb 1, 2007
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for forming improved resist layer
- Publication number 20060263514
- Publication date Nov 23, 2006
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPINDLE CHUCK CLEANER
- Publication number 20060243305
- Publication date Nov 2, 2006
- Micron Technology Inc.
- Paul Shirley
- B08 - CLEANING
Information Patent Application
Photolithographic stepper and/or scanner machines including cleanin...
- Publication number 20060201540
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Craig A. Hickman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photolithographic stepper and/or scanner machines including cleanin...
- Publication number 20060201535
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Craig A. Hickman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for two-step resist soft bake to prevent ILD outgassing duri...
- Publication number 20060008758
- Publication date Jan 12, 2006
- Micron Technology, Inc.
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for forming improved resist layer
- Publication number 20050175775
- Publication date Aug 11, 2005
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for a two-step resist soft bake to prevent ILD...
- Publication number 20050164134
- Publication date Jul 28, 2005
- Paul Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, apparatus, system and computer-readable medium for in situ...
- Publication number 20050148203
- Publication date Jul 7, 2005
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photolithographic stepper and/or scanner machines including cleanin...
- Publication number 20050028314
- Publication date Feb 10, 2005
- Craig A. Hickman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spindle chuck cleaner
- Publication number 20040159333
- Publication date Aug 19, 2004
- Micron Technology, Inc.
- Paul Shirley
- B08 - CLEANING
Information Patent Application
Method and apparatus for controlling air over a spinning microelect...
- Publication number 20030211232
- Publication date Nov 13, 2003
- Paul D. Shirley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spindle chuck cleaner
- Publication number 20030046786
- Publication date Mar 13, 2003
- Paul Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate spinning apparatus
- Publication number 20020148404
- Publication date Oct 17, 2002
- Brian F. Gordon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE FORMING METHODS
- Publication number 20020136960
- Publication date Sep 26, 2002
- ZIAD R. HATAB
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for controlling a temperature of a microelectr...
- Publication number 20020002944
- Publication date Jan 10, 2002
- Paul D. Shirley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of photo-processing photoresist
- Publication number 20010038955
- Publication date Nov 8, 2001
- Ziad R. Hatab
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate coating apparatus and semiconductor processing method of...
- Publication number 20010023137
- Publication date Sep 20, 2001
- Brian F. Gordon
- H01 - BASIC ELECTRIC ELEMENTS

Paul Shirley

Person

Patents Grantslast 30 patents

Methods and apparatus for adjusting surface topography of a substra...

Methods of lithographically patterning a substrate

Methods of lithographically patterning a substrate

Method of reducing photoresist defects during fabrication of a semi...

Methods of patterning positive photoresist

Method and apparatus for a two-step resist soft bake to prevent ILD...

Systems and methods for manipulating liquid films on semiconductor...

System for two-step resist soft bake to prevent ILD outgassing duri...

Systems and methods for manipulating liquid films on semiconductor...

Photolithographic stepper and/or scanner machines including cleanin...

Photolithographic stepper and/or scanner machines including cleanin...

Method and apparatus for controlling air over a spinning microelect...

Method and apparatus for controlling a temperature of a microelectr...

Spindle chuck cleaner

Methods of photo-processing photoresist

Method and apparatus for controlling air over a spinning microelect...

Substrate spinning apparatus

Substrate coating and semiconductor processing method of improving...

Process liquid dispense method and apparatus

Method for controlling a temperature of a microelectronic substrate

Reticle forming methods

Process liquid dispense method and apparatus

Substrate coating apparatus

Apparatus for controlling a temperature of a microelectronics subst...

Method for controlling air over a spinning microelectronic substrate

Substrate coating apparatus and semiconductor processing method of...

Process liquid dispense apparatus

Vibration-enhanced spin-on film techniques for semiconductor device...

Process liquid dispense method and apparatus

Method for forming a thin uniform layer of resist for lithography

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRA...

METHODS AND APPARATUS FOR ADJUSTING SURFACE TOPOGRAPHY OF A SUBSTRA...

Methods of Lithographically Patterning a Substrate

Methods Of Patterning Positive Photoresist

METHOD OF REDUCING PHOTORESIST DEFECTS DURING FABRICATION OF A SEMI...

Methods of Lithographically Patterning a Substrate

SYSTEMS AND METHODS FOR MANIPULATING LIQUID FILMS ON SEMICONDUCTOR...

Systems and methods for manipulating liquid films on semiconductor...

Method for in situ photoresist thickness characterization

System for situ photoresist thickness characterizaton

Spindle chuck cleaner

Method and computer-readable medium for in situ photoresist thickne...

Method for in situ photoresist thickness characterization

Device and method for forming improved resist layer

SPINDLE CHUCK CLEANER

Photolithographic stepper and/or scanner machines including cleanin...

Photolithographic stepper and/or scanner machines including cleanin...

System for two-step resist soft bake to prevent ILD outgassing duri...

Device and method for forming improved resist layer

Method and apparatus for a two-step resist soft bake to prevent ILD...

Method, apparatus, system and computer-readable medium for in situ...

Photolithographic stepper and/or scanner machines including cleanin...

Spindle chuck cleaner

Method and apparatus for controlling air over a spinning microelect...

Spindle chuck cleaner

Substrate spinning apparatus

RETICLE FORMING METHODS

Method and apparatus for controlling a temperature of a microelectr...

Methods of photo-processing photoresist

Substrate coating apparatus and semiconductor processing method of...