Paul T. Konkola

Person

Mililani, HI, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 11,955,366
- Issue date Apr 9, 2024
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,742,229
- Issue date Aug 29, 2023
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 11,387,136
- Issue date Jul 12, 2022
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,239,100
- Issue date Feb 1, 2022
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 11,056,380
- Issue date Jul 6, 2021
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,870,922
- Issue date Dec 22, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,699,937
- Issue date Jun 30, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 10,651,065
- Issue date May 12, 2020
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,570,515
- Issue date Feb 25, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pad raising mechanism in wafer positioning pedestal for semiconduct...
- Patent number 10,573,549
- Issue date Feb 25, 2020
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,354,909
- Issue date Jul 16, 2019
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 10,121,689
- Issue date Nov 6, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 10,020,220
- Issue date Jul 10, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moment cancelling pad raising mechanism in wafer positioning pedest...
- Patent number 9,960,068
- Issue date May 1, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer positioning pedestal for semiconductor processing
- Patent number 9,892,956
- Issue date Feb 13, 2018
- Lam Research Corporation
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fast acceleration reaction force cancelling motor
- Patent number 9,099,908
- Issue date Aug 4, 2015
- Eyekon Systems LLC
- Paul Konkola
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20230395410
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20220352004
- Publication date Nov 3, 2022
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VACUUM DURING TRANSFER OF SUBSTRATES
- Publication number 20220305601
- Publication date Sep 29, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20220108902
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...
- Publication number 20220028662
- Publication date Jan 27, 2022
- Paul KONKOLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20200312703
- Publication date Oct 1, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20200273731
- Publication date Aug 27, 2020
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20200173016
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20200176301
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20190341292
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20190172738
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20190067071
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20180323098
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...
- Publication number 20180211862
- Publication date Jul 26, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...
- Publication number 20180158716
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING
- Publication number 20180130696
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Paul Konkola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST ACCELERATION REACTION FORCE CANCELLING MOTOR
- Publication number 20120133249
- Publication date May 31, 2012
- EYEKON SYSTEMS LLC
- Paul T. Konkola
- G02 - OPTICS

Paul T. Konkola

Person

Patents Grantslast 30 patents

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Auto-calibration to a station of a process module that spins a wafer

Planar substrate edge contact with open volume equalization pathway...

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Auto-calibration to a station of a process module that spins a wafer

Wafer positioning pedestal for semiconductor processing

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Auto-calibration to a station of a process module that spins a wafer

Planar substrate edge contact with open volume equalization pathway...

Moment cancelling pad raising mechanism in wafer positioning pedest...

Pad raising mechanism in wafer positioning pedestal for semiconduct...

Wafer positioning pedestal for semiconductor processing

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Moment cancelling pad raising mechanism in wafer positioning pedest...

Wafer positioning pedestal for semiconductor processing

Fast acceleration reaction force cancelling motor

Patents Applicationslast 30 patents

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

USE OF VACUUM DURING TRANSFER OF SUBSTRATES

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

MULTILAYER COATINGS OF COMPONENT PARTS FOR A WORK PIECE PROCESSING...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

MOMENT CANCELLING PAD RAISING MECHANISM IN WAFER POSITIONING PEDEST...

PAD RAISING MECHANISM IN WAFER POSITIONING PEDESTAL FOR SEMICONDUCT...

WAFER POSITIONING PEDESTAL FOR SEMICONDUCTOR PROCESSING

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

FAST ACCELERATION REACTION FORCE CANCELLING MOTOR