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Paul Van Der Veen
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Eindhoven, NL
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last 30 patents
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Patent Application
Lithographic apparatus, illumination system, illumination controlle...
Publication number
20070018071
Publication date
Jan 25, 2007
ASML NETHERLANDS B.V.
Stefan Geerte Kruijswijk
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus, device manufacturing method and device manu...
Publication number
20060097199
Publication date
May 11, 2006
ASML NETHERLANDS B.V.
Paul Van Der Veen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, device manufac...
Publication number
20060033051
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Paul Van Der Veen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of manufacturing a device, and devic...
Publication number
20040189972
Publication date
Sep 30, 2004
ASML NETHERLANDS B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20040160583
Publication date
Aug 19, 2004
ASML NETHERLANDS B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical integrator for an illumination device
Publication number
20020126931
Publication date
Sep 12, 2002
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Sijbe Abraham Van Der Lei
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC