Paul Van Der Veen

Person

Waalre, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 10,222,703
- Issue date Mar 5, 2019
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,778,575
- Issue date Oct 3, 2017
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling a radiation source and lithographic apparatus...
- Patent number 9,645,510
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Wilhelmus Patrick Elisabeth Maria Op 'T Root
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,250,536
- Issue date Feb 2, 2016
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle assembly, a lithographic apparatus, the use in a lithograph...
- Patent number 9,140,999
- Issue date Sep 22, 2015
- ASML Netherlands B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,982,319
- Issue date Mar 17, 2015
- ASML Netherlands B.V.
- Roland Pieter Stolk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,937,706
- Issue date Jan 20, 2015
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system and lithographic apparatus
- Patent number 8,885,144
- Issue date Nov 11, 2014
- ASML Netherlands B.V.
- Bert Jan Claessens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulse modifier with adjustable etendue
- Patent number 8,625,199
- Issue date Jan 7, 2014
- ASML Holding N.V.
- Adel Joobeur
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and monitoring method
- Patent number 8,432,529
- Issue date Apr 30, 2013
- ASML Netherlands B.V.
- Bert Jan Claessens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulse modifier with adjustable etendue
- Patent number 8,004,770
- Issue date Aug 23, 2011
- ASML Holding N.V.
- Adel Joobeur
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,508,487
- Issue date Mar 24, 2009
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, gas supply system, method for purging, and...
- Patent number 7,476,491
- Issue date Jan 13, 2009
- ASML Netherlands B.V.
- Antonius Johannes Van Der Net
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, device manufac...
- Patent number 7,368,732
- Issue date May 6, 2008
- ASML Netherlands B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and device manu...
- Patent number 7,315,351
- Issue date Jan 1, 2008
- ASML Netherlands B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, illumination system, illumination controlle...
- Patent number 7,297,911
- Issue date Nov 20, 2007
- ASML Netherlands B.V.
- Stefan Geerte Kruijswijk
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, method of manufacturing a device, and devic...
- Patent number 7,283,208
- Issue date Oct 16, 2007
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, integrated circuit device manufacturing met...
- Patent number 7,012,265
- Issue date Mar 14, 2006
- ASML Netherlands B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, device manufac...
- Patent number 6,989,544
- Issue date Jan 24, 2006
- ASML Netherlands B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator for an illumination device
- Patent number 6,733,165
- Issue date May 11, 2004
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Sijbe Abraham Van Der Lei
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus, method of manufacturing a device, and devic...
- Patent number 6,700,646
- Issue date Mar 2, 2004
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,583,855
- Issue date Jun 24, 2003
- ASML Netherlands B.V.
- Jan Jaap Krikke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,538,716
- Issue date Mar 25, 2003
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluorescence radiation filter
- Patent number 6,473,163
- Issue date Oct 29, 2002
- ASML Netherlands B.V.
- Johannes C Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus
- Patent number 6,455,862
- Issue date Sep 24, 2002
- ASML Netherlands B.V.
- Paul van der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20170315450
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Heine Melle MULDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20160116848
- Publication date Apr 28, 2016
- ASML NETHERLANDS B.V.
- Heine Melle MULDER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CONTROLLING A RADIATION SOURCE AND LITHOGRAPHIC APPARATUS...
- Publication number 20160070179
- Publication date Mar 10, 2016
- ASML NETHERLANDS B.V.
- Wilhelmus Patrick Elisabeth Maria OP 'T ROOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ASSEMBLY, A LITHOGRAPHIC APPARATUS, THE USE IN A LITHOGRAPH...
- Publication number 20130128250
- Publication date May 23, 2013
- ASML NETHERLANDS B.V.
- Paul VAN DER VEEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ILLUMINATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20110310372
- Publication date Dec 22, 2011
- ASML NETHERLANDS B.V.
- Bert Jan CLAESSENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pulse Modifier with Adjustable Etendue
- Publication number 20110255173
- Publication date Oct 20, 2011
- ASML NETHERLANDS B.V.
- Adel JOOBEUR
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20110222029
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Roland Pieter STOLK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND MONITORING METHOD
- Publication number 20110026001
- Publication date Feb 3, 2011
- ASML NETHERLANDS B.V.
- Bert Jan CLAESSENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pulse Modifier with Adjustable Etendue
- Publication number 20100163757
- Publication date Jul 1, 2010
- ASML Holding N.V.
- Adel Joobeur
- G02 - OPTICS
Information Patent Application
Lithographic apparatus and method
- Publication number 20090033902
- Publication date Feb 5, 2009
- ASML NETHERLANDS B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080239268
- Publication date Oct 2, 2008
- ASML NETHERLANDS B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, gas supply system, method for purging, and...
- Publication number 20060055900
- Publication date Mar 16, 2006
- ASML NETHERLANDS B.V.
- Antonius Johannes Van Der Net
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, device manufac...
- Publication number 20030127607
- Publication date Jul 10, 2003
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, method of manufacturing a device, and devic...
- Publication number 20020109103
- Publication date Aug 15, 2002
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, integrated circuit device manufacturing met...
- Publication number 20020060296
- Publication date May 23, 2002
- ASM LITHOGRAPHY B.V.
- Paul Van Der Veen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020036763
- Publication date Mar 28, 2002
- Jan Jaap Krikke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020018189
- Publication date Feb 14, 2002
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluorescence radiation filter
- Publication number 20010050762
- Publication date Dec 13, 2001
- Johannes C. Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Paul Van Der Veen

Person

Patents Grantslast 30 patents

Lithographic apparatus and method

Lithographic apparatus and method

Method of controlling a radiation source and lithographic apparatus...

Lithographic apparatus and method

Reticle assembly, a lithographic apparatus, the use in a lithograph...

Lithographic apparatus and method

Lithographic apparatus and method

Illumination system and lithographic apparatus

Pulse modifier with adjustable etendue

Lithographic apparatus and monitoring method

Pulse modifier with adjustable etendue

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, gas supply system, method for purging, and...

Lithographic apparatus, device manufacturing method, device manufac...

Lithographic apparatus, device manufacturing method and device manu...

Lithographic apparatus, illumination system, illumination controlle...

Lithographic apparatus, method of manufacturing a device, and devic...

Lithographic apparatus, integrated circuit device manufacturing met...

Lithographic apparatus, device manufacturing method, device manufac...

Optical integrator for an illumination device

Lithographic apparatus, method of manufacturing a device, and devic...

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, device manufacturing method, and device man...

Fluorescence radiation filter

Lithographic projection apparatus

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND METHOD

METHOD OF CONTROLLING A RADIATION SOURCE AND LITHOGRAPHIC APPARATUS...

RETICLE ASSEMBLY, A LITHOGRAPHIC APPARATUS, THE USE IN A LITHOGRAPH...

ILLUMINATION SYSTEM AND LITHOGRAPHIC APPARATUS

Pulse Modifier with Adjustable Etendue

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND MONITORING METHOD

Pulse Modifier with Adjustable Etendue

Lithographic apparatus and method

Lithographic apparatus and method

Lithographic apparatus, gas supply system, method for purging, and...

Lithographic apparatus, device manufacturing method, device manufac...

Lithographic apparatus, method of manufacturing a device, and devic...

Lithographic apparatus, integrated circuit device manufacturing met...

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, device manufacturing method, and device man...

Fluorescence radiation filter