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Paul Z. Wirth
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Kalispell, MT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Disturbance compensation for substrate processing recipes
Patent number
12,130,606
Issue date
Oct 29, 2024
Applied Materials, Inc.
Atilla Kilicarslan
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and systems for temperature control for a substrate
Patent number
11,984,333
Issue date
May 14, 2024
Applied Materials, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,771
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,770
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature-controllable process chambers, electronic device proces...
Patent number
11,837,478
Issue date
Dec 5, 2023
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Servo-control system
Patent number
11,830,760
Issue date
Nov 28, 2023
Applied Materials, Inc.
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration of an aligner station of a processing system
Patent number
11,823,937
Issue date
Nov 21, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Centerfinding for a process kit or process kit carrier at a manufac...
Patent number
11,813,757
Issue date
Nov 14, 2023
Applied Materials, Inc.
Ali Utku Pehlivan
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Methods of use of a servo control system
Patent number
11,798,833
Issue date
Oct 24, 2023
Applied Materials, Inc.
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of controlling gas pressure in gas-pulsing-based precursor...
Patent number
11,791,172
Issue date
Oct 17, 2023
Applied Materials, Inc.
Mauro Cimino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mass flow control based on micro-electromechanical devices
Patent number
11,772,958
Issue date
Oct 3, 2023
Applied Materials, Inc.
Nir Merry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Robot for simultaneous substrate transfer
Patent number
11,590,662
Issue date
Feb 28, 2023
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for absolute and relative depth measurements...
Patent number
11,582,378
Issue date
Feb 14, 2023
Applied Materials, Inc.
Ozkan Celik
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and systems for temperature control for a substrate
Patent number
11,551,951
Issue date
Jan 10, 2023
Applied Materials, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slit valve pneumatic control
Patent number
11,415,230
Issue date
Aug 16, 2022
Applied Material, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensor-based position and orientation feedback of robot end effecto...
Patent number
11,413,767
Issue date
Aug 16, 2022
Applied Materials, Inc.
Preetham Kariyaiah Shivanna
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate transfer structure
Patent number
D938373
Issue date
Dec 14, 2021
Applied Materials, Inc.
Jason M. Schaller
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Robot for simultaneous substrate transfer
Patent number
11,117,265
Issue date
Sep 14, 2021
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature-controllable process chambers, electronic device proces...
Patent number
11,107,709
Issue date
Aug 31, 2021
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for absolute and relative depth measurements...
Patent number
11,032,464
Issue date
Jun 8, 2021
Applied Materials, Inc.
Ozkan Celik
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Walking beam chamber
Patent number
10,923,374
Issue date
Feb 16, 2021
Applied Materials, Inc.
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectronic substrate electro processing system
Patent number
10,837,119
Issue date
Nov 17, 2020
Applied Materials, Inc.
Robert B. Moore
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Methods and apparatus for absolute and relative depth measurements...
Patent number
10,498,948
Issue date
Dec 3, 2019
Applied Materials, Inc.
Ozkan Celik
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Dual-blade robot including vertically offset horizontally overlappi...
Patent number
10,453,725
Issue date
Oct 22, 2019
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Microelectronic substrate electro processing system
Patent number
10,087,544
Issue date
Oct 2, 2018
Applied Materials, Inc.
Robert B. Moore
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Robot assemblies, substrate processing apparatus, and methods for t...
Patent number
9,799,544
Issue date
Oct 24, 2017
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Microelectronic substrate electro processing system
Patent number
9,399,827
Issue date
Jul 26, 2016
Applied Materials, Inc.
Robert B. Moore
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Anneal module for semiconductor wafers
Patent number
9,245,767
Issue date
Jan 26, 2016
Applied Materials, Inc.
Vincent Steffan Francischetti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput semiconductor wafer processing
Patent number
7,934,898
Issue date
May 3, 2011
Semitool, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for thermally processing microelectronic workp...
Patent number
7,541,299
Issue date
Jun 2, 2009
Semitool, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
Publication number
20250004438
Publication date
Jan 2, 2025
Applied Materials, Inc.
Atilla Kilicarslan
G05 - CONTROLLING REGULATING
Information
Patent Application
ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION
Publication number
20240429089
Publication date
Dec 26, 2024
Applied Materials, Inc.
Peter MURAOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE
Publication number
20240258140
Publication date
Aug 1, 2024
Applied Materials, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
Publication number
20240194503
Publication date
Jun 13, 2024
Applied Materials, Inc.
Randy A. HARRIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATIONS OF ROBOT APPARATUSES WITHIN RECTANGULAR MAINFRAMES
Publication number
20240071802
Publication date
Feb 29, 2024
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
CENTERFINDING FOR A PROCESS KIT OR PROCESS KIT CARRIER AT A MANUFAC...
Publication number
20240051144
Publication date
Feb 15, 2024
Applied Materials, Inc.
Ali Utku Pehlivan
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SERVO-CONTROL SYSTEM
Publication number
20240047263
Publication date
Feb 8, 2024
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
Publication number
20240021458
Publication date
Jan 18, 2024
Applied Materials, Inc.
Nicholas Michael Bergantz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
Publication number
20230195072
Publication date
Jun 22, 2023
Applied Materials, Inc.
Atilla Kilicarslan
G05 - CONTROLLING REGULATING
Information
Patent Application
METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE
Publication number
20230154773
Publication date
May 18, 2023
Applied Materials, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SERVO-CONTROL SYSTEM
Publication number
20230028135
Publication date
Jan 26, 2023
Applied Materials, Inc.
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR MEASURING TEMPERATURE USING CENTERFIND SY...
Publication number
20220270899
Publication date
Aug 25, 2022
Applied Materials, Inc.
Paul Zachary Wirth
G05 - CONTROLLING REGULATING
Information
Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
Publication number
20220262653
Publication date
Aug 18, 2022
Randy A. HARRIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR MAINFRAME LAYOUT FOR SUPPORTING MULTIPLE SEMICONDUCTOR PROC...
Publication number
20220262652
Publication date
Aug 18, 2022
Randy A. HARRIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CENTERFINDING FOR A PROCESS KIT OR PROCESS KIT CARRIER AT A MANUFAC...
Publication number
20220111529
Publication date
Apr 14, 2022
Applied Materials, Inc.
Ali Utku Pehlivan
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
MASS FLOW CONTROL BASED ON MICRO-ELECTROMECHANICAL DEVICES
Publication number
20220083081
Publication date
Mar 17, 2022
Applied Materials, Inc.
Nir Merry
G05 - CONTROLLING REGULATING
Information
Patent Application
ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER
Publication number
20220009106
Publication date
Jan 13, 2022
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
METHODS OF CONTROLLING GAS PRESSURE IN GAS-PULSING-BASED PRECURSOR...
Publication number
20210398823
Publication date
Dec 23, 2021
Applied Materials, Inc.
Mauro Cimino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...
Publication number
20210358777
Publication date
Nov 18, 2021
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE
Publication number
20210351051
Publication date
Nov 11, 2021
Applied Materials, Inc.
Paul Zachary Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLIT VALVE PNEUMATIC CONTROL
Publication number
20210301929
Publication date
Sep 30, 2021
Applied Materials, Inc.
Paul Z. Wirth
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
METHODS AND APPARATUS FOR ABSOLUTE AND RELATIVE DEPTH MEASUREMENTS...
Publication number
20210295547
Publication date
Sep 23, 2021
Applied Materials, Inc.
Ozkan Celik
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SERVO CONTROL OF A LIFT APPARATUS AND METHODS OF USE THEREOF
Publication number
20210265194
Publication date
Aug 26, 2021
Applied Materials, Inc.
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...
Publication number
20210172728
Publication date
Jun 10, 2021
Applied Materials, Inc.
Mohsin Waqar
G01 - MEASURING TESTING
Information
Patent Application
SENSOR-BASED POSITION AND ORIENTATION FEEDBACK OF ROBOT END EFFECTO...
Publication number
20210125851
Publication date
Apr 29, 2021
Applied Materials, Inc.
Preetham Kariyaiah Shivanna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
Publication number
20210057256
Publication date
Feb 25, 2021
Applied Materials, Inc.
Nicholas Michael Bergantz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WALKING BEAM CHAMBER
Publication number
20210028040
Publication date
Jan 28, 2021
Paul Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER
Publication number
20210008727
Publication date
Jan 14, 2021
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
TEMPERATURE-CONTROLLABLE PROCESS CHAMBERS, ELECTRONIC DEVICE PROCES...
Publication number
20200243354
Publication date
Jul 30, 2020
Applied Materials, Inc.
Paul Z. Wirth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR ABSOLUTE AND RELATIVE DEPTH MEASUREMENTS...
Publication number
20200068119
Publication date
Feb 27, 2020
Applied Materials, Inc.
Ozkan Celik
G06 - COMPUTING CALCULATING COUNTING