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Paulus Antonius Andreas Teunissen
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, level sensor, method of inspection, device...
Patent number
7,646,471
Issue date
Jan 12, 2010
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Level sensor for lithographic apparatus
Patent number
7,265,364
Issue date
Sep 4, 2007
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, level sensor, method of inspection, device...
Patent number
7,248,337
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,987,555
Issue date
Jan 17, 2006
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,906,785
Issue date
Jun 14, 2005
ASML Netherlands B.V.
Rene Marinus Gerardus Johan Queens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method and Lithographic Apparatus for Acquiring Height Data Relatin...
Publication number
20090262320
Publication date
Oct 22, 2009
ASML NETHERLANDS B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Lithographic Apparatus for Measuring and Acquiring Heigh...
Publication number
20090231563
Publication date
Sep 17, 2009
ASML NETHERLANDS B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, level sensor, method of inspection, device...
Publication number
20080036988
Publication date
Feb 14, 2008
ASML NETHERLANDS B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050030507
Publication date
Feb 10, 2005
ASML NETHERLANDS B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY