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Paulus Clemens Maria PLANKEN
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Jaarsveld, NL
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Patents Grants
last 30 patents
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Patent Grant
Alignment measurement system
Patent number
11,042,096
Issue date
Jun 22, 2021
ASML Netherlands B.V.
Stefan Michiel Witte
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method and apparatus for measuring a structure on a substrate
Patent number
10,788,765
Issue date
Sep 29, 2020
ASML Netherlands B.V.
Stefan Michiel Witte
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METROLOGY METHOD AND APPARATUS
Publication number
20240184222
Publication date
Jun 6, 2024
ASML NETHERLANDS B.V.
Guido DE HAAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Alignment Measurement System
Publication number
20200142319
Publication date
May 7, 2020
ASML Netherlands B.V.
Stefan Michiel WITTE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING A STRUCTURE ON A SUBSTRATE
Publication number
20190354026
Publication date
Nov 21, 2019
ASML NETHERLANDS B.V.
Stefan Michiel WITTE
G01 - MEASURING TESTING