Pavel N. Laptev

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Santa Barbara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Stress adjustment in reactive sputtering
- Patent number 8,808,513
- Issue date Aug 19, 2014
- OEM Group, Inc.
- Pavel N Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stress adjustment in reactive sputtering
- Patent number 8,691,057
- Issue date Apr 8, 2014
- OEM Group
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for, and method of, etching a surface on a wafer
- Patent number 7,467,598
- Issue date Dec 23, 2008
- Tegal Corporation
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for, and method of, etching a surface on a wafer
- Patent number 7,270,729
- Issue date Sep 18, 2007
- Tegal Corporation
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactive sputtering of silicon nitride films by RF supported DC mag...
- Patent number 7,179,350
- Issue date Feb 20, 2007
- Tegal Corporation
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242388
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control of crystal orientation and stress in sputter deposited thin...
- Publication number 20090246385
- Publication date Oct 1, 2009
- Tegal Corporation
- Valery FELMETSGER
- C30 - CRYSTAL GROWTH
Information Patent Application
Stress adjustment in reactive sputtering
- Publication number 20090242392
- Publication date Oct 1, 2009
- Tegal Corporation
- Pavel N. LAPTEV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactive sputtering of silicon nitride films by RF supported DC mag...
- Publication number 20040231972
- Publication date Nov 25, 2004
- Pavel N. Laptev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for, and method of, etching a surface on a wafer
- Publication number 20040038548
- Publication date Feb 26, 2004
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System for, and method of, etching a surface on a wafer
- Publication number 20030017709
- Publication date Jan 23, 2003
- Pavel N. Laptev
- H01 - BASIC ELECTRIC ELEMENTS