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Pavel SEROGLAZOV
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Radiation source having debris control
Patent number
10,588,211
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Rolf Theodorus Nicolaas Beijsens
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
RADIATION SOURCE
Publication number
20160278196
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Rolf Theodorus Nicolaas BEIJSENS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR