Pavel SEROGLAZOV

Person

  • Eindhoven, NL

Patents Grantslast 30 patents

  • Information Patent Grant

    Radiation source having debris control

    • Patent number 10,588,211
    • Issue date Mar 10, 2020
    • ASML Netherlands B.V.
    • Rolf Theodorus Nicolaas Beijsens
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

  • Information Patent Application

    RADIATION SOURCE

    • Publication number 20160278196
    • Publication date Sep 22, 2016
    • ASML NETHERLANDS B.V.
    • Rolf Theodorus Nicolaas BEIJSENS
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR