Pavel Smetana

Person

Poughkeepsie, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for angular high density plasma chemical vapor...
- Patent number 9,080,239
- Issue date Jul 14, 2015
- International Business Machines Corporation
- Daewon Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for angular high density plasma chemical vapor...
- Patent number 9,016,236
- Issue date Apr 28, 2015
- International Business Machines Corporation
- Daewon Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Guard wafer for semiconductor structure fabrication
- Patent number 7,489,494
- Issue date Feb 10, 2009
- International Business Machines Corporation
- Scott M. Hargash
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Guard wafer for semiconductor structure fabrication
- Patent number 7,372,689
- Issue date May 13, 2008
- International Business Machines Corporation
- Scott M. Hargash
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning and preconditioning a chemical vapor deposition...
- Patent number 6,626,188
- Issue date Sep 30, 2003
- International Business Machines Corporation
- John A. Fitzsimmons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio-frequency coil for use in an ionized physical vapor depositio...
- Patent number 6,238,532
- Issue date May 29, 2001
- International Business Machines Corporation
- Stephen Mark Rossnagel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer clamp ring for use in an ionized physical vapor deposition ap...
- Patent number 6,176,931
- Issue date Jan 23, 2001
- International Business Machines Corporation
- Darryl D. Restaino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiprobe apparatus
- Patent number 5,293,516
- Issue date Mar 8, 1994
- International Business Machines Corporation
- Jean-Claude Fouere
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device structure employing a multi-level epitaxial st...
- Patent number 5,159,429
- Issue date Oct 27, 1992
- International Business Machines Corporation
- Robert E. Bendernagel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device structure employing...
- Patent number 5,061,652
- Issue date Oct 29, 1991
- International Business Machines Corporation
- Robert E. Bendernagel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor crystal growth via variable melt rotation
- Patent number 4,659,423
- Issue date Apr 21, 1987
- International Business Machines Corporation
- Kyong-Min Kim
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for controlled doping of silicon crystals by improved float...
- Patent number 4,556,448
- Issue date Dec 3, 1985
- International Business Machines Corporation
- Kyong M. Kim
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ANGULAR HIGH DENSITY PLASMA CHEMICAL VAPOR...
- Publication number 20120190203
- Publication date Jul 26, 2012
- International Business Machines Corporation
- Daewon Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ANGULAR HIGH DENSITY PLASMA CHEMICAL VAPOR...
- Publication number 20100029082
- Publication date Feb 4, 2010
- International Business Machines Corporation
- Daewon Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GUARD WAFER FOR SEMICONDUCTOR STRUCTURE FABRICATION
- Publication number 20080210161
- Publication date Sep 4, 2008
- Scott M. Hargash
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GUARD WAFER FOR SEMICONDUCTOR STRUCTURE FABRICATION
- Publication number 20060221537
- Publication date Oct 5, 2006
- International Business Machines Corporation
- Scott M. Hargash
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING MATERIAL RECLAMATION AND REUSE
- Publication number 20050011442
- Publication date Jan 20, 2005
- International Business Machines Corporation
- Bomy A. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for removing backside edge polymer
- Publication number 20040137745
- Publication date Jul 15, 2004
- International Business Machines Corporation
- Thomas F. Houghton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for cleaning and preconditioning a chemical vapor deposition...
- Publication number 20030000545
- Publication date Jan 2, 2003
- International Business Machines Corporation
- John A. Fitzsimmons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Pavel Smetana

Person

Patents Grantslast 30 patents

Method and apparatus for angular high density plasma chemical vapor...

Method and apparatus for angular high density plasma chemical vapor...

Guard wafer for semiconductor structure fabrication

Guard wafer for semiconductor structure fabrication

Method for cleaning and preconditioning a chemical vapor deposition...

Radio-frequency coil for use in an ionized physical vapor depositio...

Wafer clamp ring for use in an ionized physical vapor deposition ap...

Multiprobe apparatus

Semiconductor device structure employing a multi-level epitaxial st...

Method of manufacturing a semiconductor device structure employing...

Semiconductor crystal growth via variable melt rotation

Method for controlled doping of silicon crystals by improved float...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR ANGULAR HIGH DENSITY PLASMA CHEMICAL VAPOR...

METHOD AND APPARATUS FOR ANGULAR HIGH DENSITY PLASMA CHEMICAL VAPOR...

GUARD WAFER FOR SEMICONDUCTOR STRUCTURE FABRICATION

GUARD WAFER FOR SEMICONDUCTOR STRUCTURE FABRICATION

PLASMA PROCESSING MATERIAL RECLAMATION AND REUSE

Method and apparatus for removing backside edge polymer

Method for cleaning and preconditioning a chemical vapor deposition...