Pavel Stanislavovich Antsiferov

Person

Troitsk, RU

People

Patents Grantslast 30 patents

Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,368,337
- Issue date Jun 14, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 9,357,626
- Issue date May 31, 2016
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,357,627
- Issue date May 31, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Photon source, metrology apparatus, lithographic system and device...
- Patent number 8,921,814
- Issue date Dec 30, 2014
- ASML Netherlands B.V.
- Henricus Petrus Maria Pellemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,872,244
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Radiation source, lithographic apparatus, and device manufacturing...
- Patent number 6,933,510
- Issue date Aug 23, 2005
- ASML Netherlands B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20160044774
- Publication date Feb 11, 2016
- Pavel Stanislavovich ANTSIFEROV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20150311058
- Publication date Oct 29, 2015
- RND-ISAN, LTD
- Pavel Stanislavovich ANTSIFEROV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20150108373
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
Photon Source, Metrology Apparatus, Lithographic System and Device...
- Publication number 20130329204
- Publication date Dec 12, 2013
- Henricus Petrus Maria PELLEMANS
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...
- Publication number 20130070218
- Publication date Mar 21, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...
- Publication number 20110037960
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090040492
- Publication date Feb 12, 2009
- ASML NETHERLANDS B.V.
- Vladimir Vitalevich Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source, lithographic apparatus, and device manufacturing...
- Publication number 20050253092
- Publication date Nov 17, 2005
- ASML NETHERLANDS B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Radiation source, lithographic apparatus, and device manufacturing...
- Publication number 20040141165
- Publication date Jul 22, 2004
- ASML NETHERLANDS B.V.
- Givi Georgievitch Zukavishvili
- F28 - HEAT EXCHANGE IN GENERAL

Pavel Stanislavovich Antsiferov

Person

Patents Grantslast 30 patents

High-brightness LPP EUV light source

Light source with laser pumping and method for generating radiation

Photon source, metrology apparatus, lithographic system and device...

Light source with laser pumping and method for generating radiation

Photon source, metrology apparatus, lithographic system and device...

Lithographic apparatus and device manufacturing method

Radiation source, lithographic apparatus, and device manufacturing...

Patents Applicationslast 30 patents

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

Photon Source, Metrology Apparatus, Lithographic System and Device...

Photon Source, Metrology Apparatus, Lithographic System and Device...

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...

Lithographic apparatus and device manufacturing method

Radiation source, lithographic apparatus, and device manufacturing...

Radiation source, lithographic apparatus, and device manufacturing...