Pavel Viktorovich Seroglazov

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING