Pawitter J.S. Mangat

Person

Clifton Park, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method, apparatus and system for using free-electron laser compatib...
- Patent number 9,844,124
- Issue date Dec 12, 2017
- GLOBALFOUNDRIES Inc.
- Erik Robert Hosler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask structures and methods of manufacturing
- Patent number 9,195,132
- Issue date Nov 24, 2015
- Globalfoundries Inc.
- Suraj K. Patil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for fabricating EUV masks and methods for fabricating integ...
- Patent number 8,911,920
- Issue date Dec 16, 2014
- GLOBALFOUNDRIES, INC.
- Sudharshanan Raghunathan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV mask defect reconstruction and compensation repair
- Patent number 8,739,098
- Issue date May 27, 2014
- GLOBALFOUNDRIES Inc.
- Christopher H. Clifford
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet masks having annealed light-absorptive borders...
- Patent number 8,592,103
- Issue date Nov 26, 2013
- GLOBALFOUNDRIES, INC.
- Pawitter Mangat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV PATTERNING USING PHOTOMASK SUBSTRATE TOPOGRAPHY
- Publication number 20190056651
- Publication date Feb 21, 2019
- GLOBALFOUNDRIES INC.
- Erik Verduijn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, Apparatus and System for Using Free-Electron Laser Compatib...
- Publication number 20160270200
- Publication date Sep 15, 2016
- GLOBALFOUNDRIES INC.
- Erik Robert Hosler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MASK STRUCTURES AND METHODS OF MANUFACTURING
- Publication number 20150212402
- Publication date Jul 30, 2015
- GLOBALFOUNDRIES INC.
- Suraj K. PATIL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR FABRICATING EUV MASKS AND METHODS FOR FABRICATING INTEG...
- Publication number 20140272677
- Publication date Sep 18, 2014
- GLOBALFOUNDRIES, Inc.
- Sudharshanan Raghunathan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASK
- Publication number 20140170533
- Publication date Jun 19, 2014
- SEMATECH, INC.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET MASKS HAVING ANNEALED LIGHT-ABSORPTIVE BORDERS...
- Publication number 20130029253
- Publication date Jan 31, 2013
- GLOBALFOUNDRIES INC.
- Pawitter Mangat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Pawitter J.S. Mangat

Person

Patents Grantslast 30 patents

Method, apparatus and system for using free-electron laser compatib...

Mask structures and methods of manufacturing

Methods for fabricating EUV masks and methods for fabricating integ...

EUV mask defect reconstruction and compensation repair

Extreme ultraviolet masks having annealed light-absorptive borders...

Patents Applicationslast 30 patents

EUV PATTERNING USING PHOTOMASK SUBSTRATE TOPOGRAPHY

Method, Apparatus and System for Using Free-Electron Laser Compatib...

MASK STRUCTURES AND METHODS OF MANUFACTURING

METHODS FOR FABRICATING EUV MASKS AND METHODS FOR FABRICATING INTEG...

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASK

EXTREME ULTRAVIOLET MASKS HAVING ANNEALED LIGHT-ABSORPTIVE BORDERS...