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Peggy John
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Dresden, DE
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last 30 patents
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Patent Grant
Method for heating a semiconductor wafer in a process chamber by a...
Patent number
6,290,491
Issue date
Sep 18, 2001
Motorola, Inc.
Iraj Shahvandi
C30 - CRYSTAL GROWTH
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last 30 patents
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Patent Application
Wafer handling device and method for testing wafers
Publication number
20030082031
Publication date
May 1, 2003
Olivier Vatel
G01 - MEASURING TESTING