Pei-Chia Chen

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
System and method of cleaning process chamber components
- Patent number 12,014,902
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Jong Yun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of topology-selective film formation of silicon oxide
- Patent number 11,637,011
- Issue date Apr 25, 2023
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS
- Publication number 20240321555
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Jongyun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS
- Publication number 20240055230
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Jong Yun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF TOPOLOGY-SELECTIVE FILM FORMATION OF SILICON OXIDE
- Publication number 20210118667
- Publication date Apr 22, 2021
- ASM IP HOLDING B.V.
- Atsuki Fukazawa
- H01 - BASIC ELECTRIC ELEMENTS