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GRID REFINEMENT METHOD
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Publication number 20170102624
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Publication date Apr 13, 2017
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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Grid Refinement Method
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Publication number 20160246912
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Publication date Aug 25, 2016
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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Grid Refinement Method
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Publication number 20160055291
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Publication date Feb 25, 2016
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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LONG-RANGE LITHOGRAPHIC DOSE CORRECTION
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Publication number 20150052489
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Publication date Feb 19, 2015
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Cheng-Hung Chen
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G06 - COMPUTING CALCULATING COUNTING
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Grid Refinement Method
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Publication number 20140368806
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Publication date Dec 18, 2014
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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Grid Refinement Method
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Publication number 20130273475
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Publication date Oct 17, 2013
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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Grid Refinement Method
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Publication number 20130273474
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Publication date Oct 17, 2013
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Chuan Wang
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G06 - COMPUTING CALCULATING COUNTING
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NON-DIRECTIONAL DITHERING METHODS
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Publication number 20130232453
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Publication date Sep 5, 2013
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Pei-Yi Liu
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G06 - COMPUTING CALCULATING COUNTING
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Multiple-Grid Exposure Method
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Publication number 20130203001
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Publication date Aug 8, 2013
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Chuan Wang
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B82 - NANO-TECHNOLOGY
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