Pei-Yi SU

Person

Taichung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
System and methods for controlling an amount of primer in a primer...
- Patent number 12,191,214
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Pei-Yi Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor wafer and cleaning scrubber
- Patent number 12,070,779
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pei-Yi Su
- B08 - CLEANING
Information Patent Grant
Contamination handling for semiconductor apparatus
- Patent number 11,448,978
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Chun Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and method thereof
- Patent number 11,256,180
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Chun Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluidic leakage handling for semiconductor apparatus
- Patent number 11,131,931
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Chun Hsieh
- G01 - MEASURING TESTING
Information Patent Grant
Contamination handling for semiconductor apparatus
- Patent number 10,976,676
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Chun Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography tool and method thereof
- Patent number 9,811,000
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Feng Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for supplying chemical solution on semiconduct...
- Patent number 9,707,571
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Jhang Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect management systems and methods
- Patent number 9,269,135
- Issue date Feb 23, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yan-Wei Tien
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SURFACE CLEAN SYSTEM AND METHOD
- Publication number 20240383105
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Yi Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...
- Publication number 20240379467
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Pei-Yi SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE MODULE WITH CLEANING SCRUBBER
- Publication number 20240009712
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Yi SU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Contamination Handling for Semiconductor Apparatus
- Publication number 20220382174
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Chun Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...
- Publication number 20220285230
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Pei-Yi SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR WAFER AND CLEANING SCRUBBER
- Publication number 20210331211
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Yi SU
- B08 - CLEANING
Information Patent Application
SURFACE CLEAN SYSTEM AND METHOD
- Publication number 20210237228
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Yi Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINATION HANDLING FOR SEMICONDUCTOR APPARATUS
- Publication number 20210223709
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Chun Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND METHOD THEREOF
- Publication number 20200341390
- Publication date Oct 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Chun HSIEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTAMINATION HANDLING FOR SEMICONDUCTOR APPARATUS
- Publication number 20200103768
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Chun HSIEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUIDIC LEAKAGE HANDLING FOR SEMICONDUCTOR APPARATUS
- Publication number 20200004156
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Chun HSIEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPHY TOOL AND METHOD THEREOF
- Publication number 20170123328
- Publication date May 4, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Feng LIAO
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR SUPPLYING CHEMICAL SOLUTION ON SEMICONDUCT...
- Publication number 20160184839
- Publication date Jun 30, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Jhang TIAN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Defect Management Systems and Methods
- Publication number 20130231769
- Publication date Sep 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yan-Wei Tien
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

System and methods for controlling an amount of primer in a primer...

Method of manufacturing semiconductor wafer and cleaning scrubber

Contamination handling for semiconductor apparatus

Processing apparatus and method thereof

Fluidic leakage handling for semiconductor apparatus

Contamination handling for semiconductor apparatus

Photolithography tool and method thereof

Apparatus and method for supplying chemical solution on semiconduct...

Defect management systems and methods

Patents Applicationslast 30 patents

SURFACE CLEAN SYSTEM AND METHOD

SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...

EXPOSURE MODULE WITH CLEANING SCRUBBER

Contamination Handling for Semiconductor Apparatus

SYSTEM AND METHODS FOR CONTROLLING AN AMOUNT OF PRIMER IN A PRIMER...

METHOD OF MANUFACTURING SEMICONDUCTOR WAFER AND CLEANING SCRUBBER

SURFACE CLEAN SYSTEM AND METHOD

CONTAMINATION HANDLING FOR SEMICONDUCTOR APPARATUS

PROCESSING APPARATUS AND METHOD THEREOF

CONTAMINATION HANDLING FOR SEMICONDUCTOR APPARATUS

FLUIDIC LEAKAGE HANDLING FOR SEMICONDUCTOR APPARATUS

PHOTOLITHOGRAPHY TOOL AND METHOD THEREOF

APPARATUS AND METHOD FOR SUPPLYING CHEMICAL SOLUTION ON SEMICONDUCT...

Defect Management Systems and Methods