Peihaur Yih

Person

Newark, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electropolishing metal layers on wafers having trenches or vias wit...
- Patent number 6,638,863
- Issue date Oct 28, 2003
- ACM Research, Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electropolishing and electroplating methods
- Publication number 20060049056
- Publication date Mar 9, 2006
- ACM Research, Inc.
- Hui Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Adaptive electropolishing using thickness measurement and removal o...
- Publication number 20050245086
- Publication date Nov 3, 2005
- ACM Research, Inc.
- Hui Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Dummy structures to reduce metal recess in electropolishing process
- Publication number 20040253810
- Publication date Dec 16, 2004
- Hui Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Forming a semiconductor structure using a combination of planarizin...
- Publication number 20040253809
- Publication date Dec 16, 2004
- Xiang Yu Yao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electropolishing assembly and methods for electropolishing conducti...
- Publication number 20040238481
- Publication date Dec 2, 2004
- Hui Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electropolishing metal layers on wafers having trenches or vias wit...
- Publication number 20040080053
- Publication date Apr 29, 2004
- Hui Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electropolishing metal layers on wafers having trenches or vias wit...
- Publication number 20020175419
- Publication date Nov 28, 2002
- Hui Wang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Peihaur Yih

Person

Patents Grantslast 30 patents

Electropolishing metal layers on wafers having trenches or vias wit...

Patents Applicationslast 30 patents

Electropolishing and electroplating methods

Adaptive electropolishing using thickness measurement and removal o...

Dummy structures to reduce metal recess in electropolishing process

Forming a semiconductor structure using a combination of planarizin...

Electropolishing assembly and methods for electropolishing conducti...

Electropolishing metal layers on wafers having trenches or vias wit...

Electropolishing metal layers on wafers having trenches or vias wit...