Pekka Kuosmanen

Person

Espoo, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Diaphragm valve for atomic layer deposition
- Patent number 7,191,793
- Issue date Mar 20, 2007
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Precursor material delivery system for atomic layer deposition
- Patent number 7,141,095
- Issue date Nov 28, 2006
- Planar Systems, Inc.
- Bradley J. Aitchison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm valve with reliability enhancements for atomic layer depo...
- Patent number 7,021,330
- Issue date Apr 4, 2006
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
High-speed diaphragm valve for atomic layer deposition
- Patent number 6,941,963
- Issue date Sep 13, 2005
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Diaphragm valve for high-temperature precursor supply in atomic lay...
- Patent number 6,907,897
- Issue date Jun 21, 2005
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC L...
- Publication number 20070117383
- Publication date May 24, 2007
- Planar Systems, Inc.
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH
Information Patent Application
PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR AT...
- Publication number 20070089674
- Publication date Apr 26, 2007
- Planar Systems, Inc.
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH
Information Patent Application
DIAPHRAGM VALVE FOR ATOMIC LAYER DEPOSITION
- Publication number 20060174945
- Publication date Aug 10, 2006
- Planar Systems, Inc.
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
High-speed diaphragm valve for atomic layer deposition
- Publication number 20050011555
- Publication date Jan 20, 2005
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Diaphragm valve with reliability enhancements for atomic layer depo...
- Publication number 20040262562
- Publication date Dec 30, 2004
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Diaphragm valve for high-temperature precursor supply in atomic lay...
- Publication number 20040261850
- Publication date Dec 30, 2004
- Jarmo Ilmari Maula
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Precursor material delivery system for atomic layer deposition
- Publication number 20040124131
- Publication date Jul 1, 2004
- Bradley J. Aitchison
- C30 - CRYSTAL GROWTH
Information Patent Application
Capacitor fabrication methods and capacitor structures including ni...
- Publication number 20040087081
- Publication date May 6, 2004
- Bradley J. Aitchison
- H01 - BASIC ELECTRIC ELEMENTS

Pekka Kuosmanen

Person

Patents Grantslast 30 patents

Diaphragm valve for atomic layer deposition

Precursor material delivery system for atomic layer deposition

Diaphragm valve with reliability enhancements for atomic layer depo...

High-speed diaphragm valve for atomic layer deposition

Diaphragm valve for high-temperature precursor supply in atomic lay...

Patents Applicationslast 30 patents

PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC L...

PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR AT...

DIAPHRAGM VALVE FOR ATOMIC LAYER DEPOSITION

High-speed diaphragm valve for atomic layer deposition

Diaphragm valve with reliability enhancements for atomic layer depo...

Diaphragm valve for high-temperature precursor supply in atomic lay...

Precursor material delivery system for atomic layer deposition

Capacitor fabrication methods and capacitor structures including ni...