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Pen-Li HUNG
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Taichung City, TW
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last 30 patents
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Patent Grant
Chemical vapor deposition tool and operating method thereof
Patent number
10,879,049
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Ta Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
CHEMICAL VAPOR DEPOSITION TOOL AND OPERATING METHOD THEREOF
Publication number
20170032940
Publication date
Feb 2, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Ta LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...