Peng CHANG

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cu wiring forming method and semiconductor device manufacturing method
- Patent number 10,163,699
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Hiroyuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing Cu wiring
- Patent number 10,096,548
- Issue date Oct 9, 2018
- Tokyo Electron Limited
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method and storage medium
- Patent number 9,735,046
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Peng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming copper wiring
- Patent number 9,362,166
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manganese metal film forming method, processing system, electronic...
- Patent number 9,136,132
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Cu WIRING FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20180047624
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki Nagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND STORAGE MEDIUM
- Publication number 20170062269
- Publication date Mar 2, 2017
- TOKYO ELECTRON LIMITED
- Peng CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING Cu WIRING
- Publication number 20160276218
- Publication date Sep 22, 2016
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING COPPER WIRING
- Publication number 20150262872
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANGANESE METAL FILM FORMING METHOD, PROCESSING SYSTEM, ELECTRONIC...
- Publication number 20140183743
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Kenji MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...