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Hsinchu, TW
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last 30 patents
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Patent Grant
Wet bench process with in-situ pre-treatment operation
Patent number
12,347,692
Issue date
Jul 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Wei Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
Publication number
20230369056
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230062572
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
B08 - CLEANING