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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Controlling photo acid diffusion in lithography processes
Patent number
10,108,093
Issue date
Oct 23, 2018
Applied Materials, Inc.
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Controlling photo acid diffusion in lithography processes
Patent number
9,798,240
Issue date
Oct 24, 2017
Applied Materials, Inc.
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tooling configuration for electric/magnetic field guided acid profi...
Patent number
9,733,579
Issue date
Aug 15, 2017
Applied Materials, Inc.
Sang Ki Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optically tuned hardmask for multi-patterning applications
Patent number
9,478,421
Issue date
Oct 25, 2016
Applied Materials, Inc.
Christopher Dennis Bencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Resist hardening and development processes for semiconductor device...
Patent number
9,411,237
Issue date
Aug 9, 2016
Applied Materials, Inc.
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electric/magnetic field guided acid diffusion
Patent number
9,377,692
Issue date
Jun 28, 2016
Applied Materials, Inc.
Peng Xie
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electric/magnetic field guided acid profile control in a photoresis...
Patent number
9,366,966
Issue date
Jun 14, 2016
Applied Materials, Inc.
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Field guided exposure and post-exposure bake process
Patent number
9,280,070
Issue date
Mar 8, 2016
Applied Materials, Inc.
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optically tuned hardmask for multi-patterning applications
Patent number
9,177,796
Issue date
Nov 3, 2015
Applied Materials, Inc.
Christopher Dennis Bencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CONTROLLING PHOTO ACID DIFFUSION IN LITHOGRAPHY PROCESSES
Publication number
20180052396
Publication date
Feb 22, 2018
Applied Materials, Inc.
Peng XIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST HARDENING AND DEVELOPMENT PROCESSES FOR SEMICONDUCTOR DEVICE...
Publication number
20160329222
Publication date
Nov 10, 2016
Applied Materials, Inc.
Peng Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETIC FIELD GUIDED CRYSTAL ORIENTATION SYSTEM FOR METAL CONDUCTI...
Publication number
20160208415
Publication date
Jul 21, 2016
Applied Materials, Inc.
Christopher Dennis Bencher
C30 - CRYSTAL GROWTH
Information
Patent Application
TOOLING CONFIGURATION FOR ELECTRIC/MAGNETIC FIELD GUIDED ACID PROFI...
Publication number
20160109813
Publication date
Apr 21, 2016
Applied Materials, Inc.
Sang Ki NAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICALLY TUNED HARDMASK FOR MULTI-PATTERNING APPLICATIONS
Publication number
20160042951
Publication date
Feb 11, 2016
Applied Materials, Inc.
Christopher Dennis BENCHER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTROLLING PHOTO ACID DIFFUSION IN LITHOGRAPHY PROCESSES
Publication number
20160011518
Publication date
Jan 14, 2016
Applied Materials, Inc.
Peng XIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FIELD GUIDED EXPOSURE AND POST-EXPOSURE BAKE PROCESS
Publication number
20160011526
Publication date
Jan 14, 2016
Applied Materials, Inc.
Peng XIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRIC/MAGNETIC FIELD GUIDED ACID PROFILE CONTROL IN A PHOTORESIS...
Publication number
20160011515
Publication date
Jan 14, 2016
Applied Materials, Inc.
Peng XIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRIC/MAGNETIC FIELD GUIDED ACID DIFFUSION
Publication number
20150355549
Publication date
Dec 10, 2015
Applied Materials, Inc.
Peng XIE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICALLY TUNED HARDMASK FOR MULTI-PATTERNING APPLICATIONS
Publication number
20140327117
Publication date
Nov 6, 2014
Applied Materials, Inc.
Christopher Dennis BENCHER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RESIST HARDENING AND DEVELOPMENT PROCESSES FOR SEMICONDUCTOR DEVICE...
Publication number
20140263172
Publication date
Sep 18, 2014
Peng Xie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY