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Penggang HAN
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Shanghai, CN
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Patents Grants
last 30 patents
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Patent Grant
Etching method and a semiconductor device
Patent number
11,152,220
Issue date
Oct 19, 2021
Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
Penggang Han
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD AND A SEMICONDUCTOR DEVICE
Publication number
20200168470
Publication date
May 28, 2020
SHANGHAI HUALI MICROELECTRONICS CORPORATION
Penggang HAN
H01 - BASIC ELECTRIC ELEMENTS