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Shanghai, CN
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Patents Grants
last 30 patents
Information
Patent Grant
Automatic optical inspection device and method
Patent number
11,549,891
Issue date
Jan 10, 2023
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Hailiang Lu
G01 - MEASURING TESTING
Information
Patent Grant
Chip defect detection device and detection method
Patent number
10,942,129
Issue date
Mar 9, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Pengli Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Off-axis alignment system and alignment method
Patent number
9,448,488
Issue date
Sep 20, 2016
Shanghai Micro Electronics Equipment Co., Ltd.
Pengli Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
CHIP DEFECT DETECTION DEVICE AND DETECTION METHOD
Publication number
20200173932
Publication date
Jun 4, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Pengli ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC OPTICAL INSPECTION DEVICE AND METHOD
Publication number
20190293566
Publication date
Sep 26, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Hailiang LU
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and Method for 3D Surface Inspection
Publication number
20180195971
Publication date
Jul 12, 2018
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Fan Wang
G01 - MEASURING TESTING
Information
Patent Application
LASER ANNEALING DEVICE
Publication number
20170144251
Publication date
May 25, 2017
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Chunfeng SONG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Off-Axis Alignment System and Alignment Method
Publication number
20150261098
Publication date
Sep 17, 2015
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Pengli Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY