Per Arne Wang

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Patents Grantslast 30 patents

Information Patent Grant
Reduction of attraction forces between silicon wafers
- Patent number 7,967,915
- Issue date Jun 28, 2011
- Rec Scanwafer AS
- Erik Sauar
- B28 - WORKING CEMENT, CLAY, OR STONE

Patents Applicationslast 30 patents

Information Patent Application
WAFER STACK CLEANING
- Publication number 20110168212
- Publication date Jul 14, 2011
- REC ScanWafer AS
- Per Arne Wang
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
Method For Separating Wafers From A Stack Of Wafers
- Publication number 20090226283
- Publication date Sep 10, 2009
- REC ScanWafer AS
- Eivind Johannes Ovrelid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reduction of Attraction Forces Between Silicon Wafers
- Publication number 20090117713
- Publication date May 7, 2009
- REC ScanWafer AS
- Erik Sauar
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
Method and device for separating silicon wafers
- Publication number 20080146003
- Publication date Jun 19, 2008
- REC ScanWafer AS
- Per Arne Wang
- B28 - WORKING CEMENT, CLAY, OR STONE