Periya Gopalan

Person

Chandler, AR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the electrochemical deposition and planari...
- Patent number 7,297,239
- Issue date Nov 20, 2007
- Novellus Systems, Inc.
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for cleaning workpieces
- Patent number 6,818,604
- Issue date Nov 16, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for the electrochemical deposition and planari...
- Patent number 6,802,955
- Issue date Oct 12, 2004
- SpeedFam-IPEC Corporation
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing pad window for a chemical mechanical polishing tool
- Patent number 6,685,537
- Issue date Feb 3, 2004
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING
Information Patent Grant
Cathodic protection design method, current mapping and system
- Patent number 6,582,587
- Issue date Jun 24, 2003
- The Johns Hopkins University
- Rengaswamy Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer cleaning apparatus and associated wafer processing methods
- Patent number 6,368,183
- Issue date Apr 9, 2002
- SpeedFam-IPEC Corporation
- Daniel Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mapping system for semiconductor wafer cassettes
- Patent number 6,364,745
- Issue date Apr 2, 2002
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Combined CMP and wafer cleaning apparatus and associated methods
- Patent number 6,350,177
- Issue date Feb 26, 2002
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Integral machine for polishing, cleaning, rinsing and drying workpi...
- Patent number 6,213,853
- Issue date Apr 10, 2001
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 6,125,861
- Issue date Oct 3, 2000
- SpeedFam-IPEC Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 5,954,888
- Issue date Sep 21, 1999
- Speedfam Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for the electrochemical deposition and planari...
- Publication number 20050016681
- Publication date Jan 27, 2005
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for the electrochemical deposition and planari...
- Publication number 20030132120
- Publication date Jul 17, 2003
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and method for cleaning workpieces
- Publication number 20030069150
- Publication date Apr 10, 2003
- Ismail Emesh
- B08 - CLEANING
Information Patent Application
Chemical mechanical polishing method and apparatus for removing mat...
- Publication number 20020151255
- Publication date Oct 17, 2002
- Tim Dyer
- B24 - GRINDING POLISHING
Information Patent Application
Reinforced CMP carrier bladders
- Publication number 20020077049
- Publication date Jun 20, 2002
- SpeedFam-IPEC Corporation
- Clinton O. Fruitman
- B24 - GRINDING POLISHING

Periya Gopalan

Person

Patents Grantslast 30 patents

Method and apparatus for the electrochemical deposition and planari...

System and method for cleaning workpieces

Method and apparatus for the electrochemical deposition and planari...

Polishing pad window for a chemical mechanical polishing tool

Cathodic protection design method, current mapping and system

Wafer cleaning apparatus and associated wafer processing methods

Mapping system for semiconductor wafer cassettes

Combined CMP and wafer cleaning apparatus and associated methods

Integral machine for polishing, cleaning, rinsing and drying workpi...

Post-CMP wet-HF cleaning station

Post-CMP wet-HF cleaning station

Patents Applicationslast 30 patents

Method and apparatus for the electrochemical deposition and planari...

Method and apparatus for the electrochemical deposition and planari...

System and method for cleaning workpieces

Chemical mechanical polishing method and apparatus for removing mat...

Reinforced CMP carrier bladders