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Peter A. Burke
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Milton, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical-mechanical polishing slurry that reduces wafer defects and...
Patent number
6,325,705
Issue date
Dec 4, 2001
Advanced Micro Devices, Inc.
Peter A. Burke
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Chemical-mechanical polishing slurry that reduces wafer defects
Patent number
6,168,640
Issue date
Jan 2, 2001
Advanced Micro Devices, Inc.
Peter A. Burke
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing pad having a wear level indicator and system using the same
Patent number
6,106,661
Issue date
Aug 22, 2000
Advanced Micro Devices, Inc.
Christopher H. Raeder
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatuses and methods for polishing semiconductor wafers
Patent number
6,093,085
Issue date
Jul 25, 2000
Advanced Micro Devices, Inc.
Bradley J. Yellitz
B24 - GRINDING POLISHING
Information
Patent Grant
Method for determining the efficiency of a planarization process
Patent number
6,057,068
Issue date
May 2, 2000
Advanced Micro Devices, Inc.
Christopher H. Raeder
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polish platen and method of use
Patent number
6,056,631
Issue date
May 2, 2000
Advanced Micro Devices, Inc.
Thomas M. Brown
B24 - GRINDING POLISHING
Information
Patent Grant
Seasoning of a semiconductor wafer polishing pad to polish tungsten
Patent number
6,051,495
Issue date
Apr 18, 2000
Advanced Micro Devices, Inc.
Peter A. Burke
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for measuring critical dimensions on a semicon...
Patent number
6,000,281
Issue date
Dec 14, 1999
Advanced Micro Devices, Inc.
Peter A. Burke
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Apparatus and method for cleaning semiconductor wafer
Patent number
5,966,766
Issue date
Oct 19, 1999
Advanced Micro Devices, Inc.
Kevin D. Shipley
B08 - CLEANING
Information
Patent Grant
Methods of making and using a chemical-mechanical polishing slurry...
Patent number
5,934,978
Issue date
Aug 10, 1999
Advanced Micro Devices, Inc.
Peter A. Burke
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Chemical-mechanical polishing slurry formulation and method for tun...
Patent number
5,916,855
Issue date
Jun 29, 1999
Advanced Micro Devices, Inc.
Steven C. Avanzino
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Polishing pad with radially extending tapered channels
Patent number
5,645,469
Issue date
Jul 8, 1997
Advanced Micro Devices, Inc.
Peter A. Burke
B24 - GRINDING POLISHING
Information
Patent Grant
Polishstop planarization structure
Patent number
5,510,652
Issue date
Apr 23, 1996
International Business Machines Corporation
Peter A. Burke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-mechanical polishing tool with end point measurement station
Patent number
5,492,594
Issue date
Feb 20, 1996
International Business Machines Corp.
Peter A. Burke
B24 - GRINDING POLISHING
Information
Patent Grant
Polishstop planarization method and structure
Patent number
5,356,513
Issue date
Oct 18, 1994
International Business Machines Corporation
Peter A. Burke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for improving sheet resistance of an integrated circuit dev...
Patent number
5,268,330
Issue date
Dec 7, 1993
International Business Machines Corporation
John H. Givens
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Chemical-mechanical polishing slurry that reduces wafer defects
Publication number
20010002357
Publication date
May 31, 2001
Peter A. Burke
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...