Peter Baumgart

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reflective display
- Patent number 11,722,648
- Issue date Aug 8, 2023
- MirraViz, Inc.
- Peter M. Baumgart
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method of purifying target material for an EUV light source
- Patent number 11,317,501
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Reflective display
- Patent number 11,079,668
- Issue date Aug 3, 2021
- MIRRAVIZ, INC.
- Peter M. Baumgart
- G02 - OPTICS
Information Patent Grant
System method and apparatus for high pressure liquid jet cleaning o...
- Patent number 10,632,505
- Issue date Apr 28, 2020
- ASML Netherlands B.V.
- Armin Bernhard Ridinger
- B08 - CLEANING
Information Patent Grant
Droplet generator for lithographic apparatus, EUV source and lithog...
- Patent number 10,481,498
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for purifying target material for EUV light so...
- Patent number 10,455,680
- Issue date Oct 22, 2019
- ASML Netherlands B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Droplet generator steering system
- Patent number 10,426,020
- Issue date Sep 24, 2019
- ASML Netherlands B.V.
- Peter M. Baumgart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of and apparatus for supply and recovery of target material
- Patent number 9,699,876
- Issue date Jul 4, 2017
- ASML Netherlands, B.V.
- Georgiy Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,632,418
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of supplying target material
- Patent number 9,544,983
- Issue date Jan 10, 2017
- ASML Netherlands B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target material supply apparatus for an extreme ultraviolet light s...
- Patent number 9,392,678
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Droplet generator steering system
- Patent number 9,279,445
- Issue date Mar 8, 2016
- ASML Netherlands B.V.
- Peter M. Baumgart
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,969,840
- Issue date Mar 3, 2015
- ASML Netherlands B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,829,477
- Issue date Sep 9, 2014
- ASML Netherlands B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Filter for material supply apparatus
- Patent number 8,816,305
- Issue date Aug 26, 2014
- ASML Netherlands B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator with actuator induced nozzle cleaning
- Patent number 8,513,629
- Issue date Aug 20, 2013
- Cymer, LLC
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE DISPLAY
- Publication number 20230403377
- Publication date Dec 14, 2023
- MIRRAVIZ, INC.
- Peter M. Baumgart
- G02 - OPTICS
Information Patent Application
REFLECTIVE DISPLAY
- Publication number 20220014718
- Publication date Jan 13, 2022
- MIRRAVIZ, INC.
- Peter M. Baumgart
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
BRIGHTNESS AND UNIFORMITY-ENHANCED PROJECTOR SCREEN
- Publication number 20210311381
- Publication date Oct 7, 2021
- MIRRAVIZ, INC.
- Michael Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
- Publication number 20200015343
- Publication date Jan 9, 2020
- ASML NETHERLANDS B.V.
- Georgiy VASCHENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...
- Publication number 20180364580
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Johan Frederik Dijksman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System Method and Apparatus for High Pressure Liquid Jet Cleaning o...
- Publication number 20170291196
- Publication date Oct 12, 2017
- ASML NETHERLANDS B.V.
- Armin Bernhard Ridinger
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
- Publication number 20170247778
- Publication date Aug 31, 2017
- ASML NETHERLANDS B.V.
- Georgiy Vaschenko
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20160274466
- Publication date Sep 22, 2016
- ASML NETHERLANDS B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR STEERING SYSTEM
- Publication number 20160150626
- Publication date May 26, 2016
- ASML NETHERLANDS B.V.
- Peter M. BAUMGART
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL
- Publication number 20160128170
- Publication date May 5, 2016
- ASML NETHERLANDS B.V.
- Chirag RAJYAGURU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20140346373
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL
- Publication number 20140261761
- Publication date Sep 18, 2014
- Georgiy VASCHENKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...
- Publication number 20140102875
- Publication date Apr 17, 2014
- Silvia De Dea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20130234051
- Publication date Sep 12, 2013
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR STEERING SYSTEM
- Publication number 20130153792
- Publication date Jun 20, 2013
- Cymer, Inc.
- Peter M. Baumgart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Filter for Material Supply Apparatus
- Publication number 20130153603
- Publication date Jun 20, 2013
- Cymer, Inc.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING
- Publication number 20120286176
- Publication date Nov 15, 2012
- Chirag Rajyaguru
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Peter Baumgart

Person

Patents Grantslast 30 patents

Reflective display

Method of purifying target material for an EUV light source

Reflective display

System method and apparatus for high pressure liquid jet cleaning o...

Droplet generator for lithographic apparatus, EUV source and lithog...

Method and apparatus for purifying target material for EUV light so...

Droplet generator steering system

Method of and apparatus for supply and recovery of target material

Target material supply apparatus for an extreme ultraviolet light s...

Apparatus for and method of supplying target material

Target material supply apparatus for an extreme ultraviolet light s...

Droplet generator steering system

Droplet generator with actuator induced nozzle cleaning

Droplet generator with actuator induced nozzle cleaning

Filter for material supply apparatus

Droplet generator with actuator induced nozzle cleaning

Patents Applicationslast 30 patents

REFLECTIVE DISPLAY

REFLECTIVE DISPLAY

BRIGHTNESS AND UNIFORMITY-ENHANCED PROJECTOR SCREEN

METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...

DROPLET GENERATOR FOR LITHOGRAPHIC APPARATUS, EUV SOURCE AND LITHOG...

System Method and Apparatus for High Pressure Liquid Jet Cleaning o...

METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

DROPLET GENERATOR STEERING SYSTEM

APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING

METHOD OF AND APPARATUS FOR SUPPLY AND RECOVERY OF TARGET MATERIAL

TARGET MATERIAL SUPPLY APPARATUS FOR AN EXTREME ULTRAVIOLET LIGHT S...

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING

DROPLET GENERATOR STEERING SYSTEM

Filter for Material Supply Apparatus

DROPLET GENERATOR WITH ACTUATOR INDUCED NOZZLE CLEANING