Membership
Tour
Register
Log in
Peter Benizri-Carl
Follow
Person
Alzey, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
X-ray enhanced SEM critical dimension measurement
Patent number
5,798,525
Issue date
Aug 25, 1998
International Business Machines Corporation
Peter Benizri-Carl
G01 - MEASURING TESTING